Modal control is very important for effective operations of active optical systems. Several types of modes are studied for a 1.2 m active mirror, such as Zernike modes, free vibration modes of the primary mirror and eigen modes. Eigen modes are referred to modal analyses of membrane deformable mirrors and modal control based on eigen modes of the primary mirror haven’t been found yet. Considering the fitting accuracy of the active mirror for various modes and the relationship between fitting capability and the number of modes adopted, defocus, 3rd coma and 9 eigen modes are used for modal control of the 1.2 m active mirror. Defocus and 3rd coma are corrected through the movement and tilt of the secondary mirror and 9 eigen modes are corrected through force actuators at the back of the primary mirror.

Adaptive Optics(AO) based on Stochastic Parallel Gradient Descent(SPGD) corrects the wave-front aberration by directly optimizing the performance evaluation function of the system. It may realize real-time correction and has great application potential. The convergence rate of SPGD algorithm is closely related with the number of the control units, the selection of the performance evaluation function, the value of gain coefficient and disturbance amplitude. Through the simulation method, the influence of the number of control units on the convergence rate was studied when SPGD AO system was used for static wave-front aberration correction. A conclusion was reached that there was a linear relationship between the number of control units and the required number of iterative for convergence. SPGD AO system used for dynamic wave-front aberration correction under different iterative rate and wind speed was simulated, and suggestions for the selection of number of control units were provided.

In order to reduce the influence of anisoplanatism on the performance of telescope imaging system, and expand the effective Field-of-view(FOV) of system, anisoplanatic effect in wide-field-of-view telescope imaging system is studied here. First, a numerical simulation of anisoplanatic imaging through volume atmospheric turbulence by using multiple random phase screens has been developed. Then, the mean-square wave front errors of two separate object points between the on-axis position and the off-axis position with angle θ are calculated based on the numerical simulation system under the typical atmospheric condition(atmospheric coherent length r0 = 0.1 m). The results show that when tilt errors have been included in the aberrated wave front, anisoplanatic effect becomes weaker as the diameter D of the imaging system increases, and the ascending variation of the mean-square wave front errors is less severe. Whereas, when tilt errors have been excluded, anisoplanatic effect becomes greater as the D increases, and the ascending variation of these is more severe. The larger the diameter of system aperture is, the weaker tilt anisoplanatism is. For large-aperture telescope imaging system, like D≥5 m, high-order wave front errors are the crucial influence.

In order to accomplish the requirement of large scale focal plane and high resolution during the development of space based remote optical sensors, we developed a focal plane pointed technique. First, we designed a transmission telescope with large focal plane. Then, we proposed a mechanical interleaving assembly method to achieve the required scale of focal plane. Besides, the function principle and some key techniques of the focal plane pointed telescope are analyzed. Finally, images are gained using the telescope and the system errors are discussed as well. Experimental results indicate that the pointing stability should be better than 1.6 mrad and the flatness of the focal plane should be confined in 20 μm. The focal plane pointed method can satisfy the system requirements of large scale focal plane.

In order to extract the star effectively, and improve the star map identification efficiency and the attitude precision of star map, a method of star extraction based on the commonness between star and small target using morphological was proposed. Background was estimated by morphological and suppressed by gray-scale morphology Top-Hat transform, and the star image was comprised of star target and high frequency noise. Self-adaptive threshold value method was adopted to determine the actual image threshold. The results indicate that the method can well suppress the background noise, and redound to selecting threshold and confirming the brightness of target. Moreover, the brightness of target confirmed is more effective than conventional methods, and the coordinates of centroid compared with the true value does not exceed 0.3 pixels unit.

A new microscanner was designed and fabricated using a Silicon-on-insulator(SOI) process. In order to realize real-time measurement of the electromechanical characterization for MEMS scanner, a measuring system was investigated including the principle of microscanner, the electromechanical characterization of microscanner, the measuring method, the system realization and the system accuracy evaluation. First, the principle of microscanner was presented and the design of structure was discussed as well as the electromechanical characterization. Then, based on the study of the measuring method, the design of measuring system was determined. Furthermore, the circuit and software in system were analyzed and designed. Finally, aiming to evaluate the accuracy and reliability of the measuring system, the tests on amplitude and frequency were implemented respectively and the experimental results agreed well with the data obtained by using Laser Doppler Vibrometer(LDV) and laser triangulation. It can satisfy the system requirements of stabilization, higher precision and real-time. Therefore, the research of this paper has significant reference value to the closed loop control of microscanner and the realization of micro spectrometer.

The resolution of lithography has become higher and higher to satisfy the demand of the continuous reduction of integrated circuit critical dimension(CD). As to the Rayleigh criterion, the resolution of optical projection lithography can be enhanced by reducing the wavelength, lowering the process factor and enlarging the numerical aperture(NA). As NA becomes larger, the polarization of light affects the imaging more significantly. By using the polarized illumination, the resolution can be improved. The reason why the polarization of light affects the imaging is analyzed by interference principle. The imaging of different polarized light is simulated with the Abbe’s theory of image formation and vector’s property. The image contrast and Depth of Focus(DOF) under different polarization are compared. The result shows that imaging performance can be improved by optimizing the polarization of illumination.

Based upon the principle that an asymmetric electric field can generate a repulsive force, a micro out-of-plane electrostatic repulsive actuator with a unit dimension of 300 μm is designed and fabricated. The stroke of this kind of actuator is far larger than the traditional attractive actuators for it is not limited by the “Pull-in” phenomenon. The actuator is prepared using a surface micromachining polysilicon processes. To study the dynamic performance of the actuator, an equivalent model of the electrostatic repulsive micro driver is proposed. The squeeze air film damping effect and frequency response of the micro driver are analyzed based upon the numerical method. The static and dynamic characteristics of the actuator are tested using a white light interferometer. The results show that the static displacement of this kind of actuator reaches 2.1 μm at 100 V, and the actuator has a wide working bandwidth of 2 kHz and a fast response ability.

Statistics on reflective light intensity of rough surfaces is not only based on simple theory, but also able to give the most important features of rough surface scattering. The theoretic analysis and deduction of reflective light field of rough surface is performed, and the results suggest that the key features of reflective light field of rough surface is determined by the Fourier transform of rough surface highness distribution and the incident light field. In case of Gauss surface illuminated by uniform parallel light, the reflective intensity is a Gauss function of the effective roughness, and its distribution on the focal plane is a sinc square function.

Using the high precision digital stress measurement instrument, we measured the stress of KDP crystal. Through measuring the optical axis of KDP, the birefringence of ordinary light and extraordinary light is diminished, and the inner stress of the KDP is gained, The repeatability of measurement is better than 0.1 nm/cm. The high precision digital stress measurement of KDP is of great importance to machining and utilization.

By summarizing various algorithms of blind pixels detection and compensation, we can divide blind pixels into four types for their different respondent appearance, which are dead pixels, dark current pixels, noisy pixels and blinking pixels. Different algorithms with different thresholds are proposed to detect different types of blind pixels. Compared with the traditional algorithms, the algorithm takes dark current pixels and blinking pixels into account and has high precision of detection. Based on the pertinence between the adjacent pixels, a compensation algorithm is advanced to detect congregated blind pixels and replace the blind pixels on the edge of image. Experiments show that the algorithm is practical and acceptable.

In recent years, Ultraviolet(UV) detection technology in corona discharge detection and defect diagnosis of partial discharge has been widely used. However, electro-optic characteristics and quantitative relationship between corona current and UV emission intensity in the process of corona discharge are virtually worth studying deeply. With different Alternating Current(AC) voltage and different humidity, corona current and UV pulse number are measured. It is shown that corona current and pulse number rise with the voltage mounting up and approximately decline with humidity increasing. In addition, further discusses about the quantitative relationship between corona current and UV pulse number are implemented by using transfer function. The experiment results, under the conditions of different AC voltage and different humidity, indicate that transfer function maintained between 2.4～3.6 changes little. UV pulse number, therefore, can be used to characterize corona current intensity. The conclusions above are significant for characterizing the level of corona discharge directly by UV emission intensity, and are helpful for improving the accuracy of defect diagnosis.

To satisfy high precision testing of interferometer, rotation method to calibrate interferometer’s system error is used for absolute test and improving precision. The method based on properties of Zernike polynomial, which can be realized in two ways: N-position and Two-position method. Theoretical analysis and experiments are taken on both N-position and two-position rotation methods, and results and error analysis are given. The experimental results show that the solutions of the two methods are nearly the same, and the PV value of the difference is 0.006 λ, and RMS is 0.001 λ. Error analysis show that the rotation error of two-position is smaller. So two-position method has higher precision than N-position method.

Based on analysis of Chemo-mechanical-grinding(CMG) technology with Soft Abrasive Grinding Wheel(SAGW), cup-type SAGWs with Fe2O3 and MgO as the main material were respectively developed. The contrast grinding process with the developed two kinds of SAGWs was applied to nano-precision finishing for optical surface of silicon(Ф150 mm) and machining parameters were optimal selected. Contrastive analysis of CMG, diamond wheel grinding and Chemical Mechanical Polishing(CMP) for mirror were carried out. The surface and sub-surface damaged by CMG with SAGW were detected and analyzed. The results indicated that the grinding performance of MgO SAGW were stable. Good form precision and surface roughness were obtained. Measurement of CMG mirror from 3D surface profiler(0.568 nm RMS) or atomic force microscope(0.554 nm Rq) was reached to the roughness of CMP mirror. Sub-surface Damage Depth(SDD) by angle polishing method was detected, which was close to zero.

Single-point diamond cutting is the best method to machine the KDP crystal. On the basis of independent study and development, the key technologies of ultra-precision gas hydrostatic spindle and guideway design and manufacturing, constant velocity direct drive technology of high precision spindle and worktable are solved and DFC-600A ultra-precision single-point diamond fly cutting machine tool is developed successfully by studying the single-point diamond cutting mechanism thoroughly. The process experiment results demonstrate that this machine tool can realize the ultra-precision machining of large-scale optical components, such as KDP crystal, aluminum alloy and polycarbonate.

A method is proposed to solve the problem of polishing the grooves and channels of matrix of Ring Laser Gyro(RLG). Both the glass-ceramic composition and chemical polishing mechanism are analyzed. Meanwhile, the technical solution, work flow and operation method are given. The result shows that the roughness and the transmittance of the surface, polished by the mixed solution of NH4HF2, H2O and additive, can reach 0.2～0.3 μm and 88～90% respectively. At the same time, the chemical polishing etching depth is 0~100 μm, realizing the "certainty" polishing to complex components.

Germanium(Ge) thin films is one of the most commonly used optical film in long-wave and medium-wave infrared. High packing density for enhancing the spectra stability and the quality of the optical thin film elements is extremely important. Using 99.99% purity of the Ge materials, Ge thin films were prepared by electron beam evaporation in about 5×10-4 Pa vacuum pressure at different deposited temperature, while deposition rate was monitored and demonstrated at 0.8 ~ 1.0 nm/s by quartz crystal oscillation controller. The thickness of the thin films on silicon substrate is about 0.8 ~ 1.0 μm. Using the Fourier transform infrared spectrometer to test the spectral characteristics of Ge thin films before and after the thin film suck tide, according to the wavelength deviation dispersion theory, the packing density is calculated. The results show that as the deposition temperature increases, the packing density increases from 0.74 at room temperature to 0.99 at 250℃.

Bimorph mirrors based on the use of piezoelectric actuators are important part in some laser systems, such as 10.6 μm laser system. In order to deposit the bimorph mirror, the clamping ways and deposition temperature are first factors to be considered for two models with different clamping ways of bimorph mirror developed using FEA software. The distribution of deformation and stress of bimorph mirror due to thermal residual stress are calculated. Based on the results, we select the better clamping way to deposit the bimorph mirror. In order to predict the temperature rising of mirror surface induced by the 10.6 μm laser irradiation, the FEA models of bimorph mirrors with different mirror surface materials, which include the mono-crystalline silicon and quartz glass, are developed and calculated. Finally, the coated bimorph mirror is measured by spectrometer, and the average reflectance of enhanced coating is greater than 99.5% in 10.6 um. The coated bimorph deformable mirror is now applied in the 10.6um laser system and can satisfy the practical need.

Ga-doped ZnO(GZO) films with low resistivity and high transmittance are got firstly on the condition that the thickness of films is smaller than 200 nm by RF magnetron sputtering. The microstructures of GZO films were observed with Scanning Electron Microscope(SEM). The optical and electrical properties of GZO films were respectively measured using a four-point probe technique and UV-2102 spectrophotometer. The results show that the resistivity of GZO films which decreased from 46.6×10-2.·cm to 2.5×10-2.·cm decreased rapidly with the sputtering power increasing. When the wavelength range was in 300~350 nm, the increase of sputtering power made the transmittance of GZO films decrease, but the width of transmittance increase. When the wavelength range was in 350~380 nm, the transmittance of GZO films was enhanced. The average transmittance of GZO films are more than 89%. With increasing of sputtering power, the bandgap of GZO films first increases, and then decreases. The surface morphology variation of GZO films show that the morphology of thin film changes from the apparent separation of particles to continuous distribution.

Embedded FBG sensors can detect the internal state of stresses, temperatures and many other factors as an alternative to the other sensors. Before being embedded into the metal structures, FBG sensors must be protected by some metal materials. The discrepancy exists between the stress values recorded by FBG and the actual stresses. This paper relates the discrepancy to the two parameters that are the stress transfer coefficient and the location function. For a special connecting layer, the bigger elastic modulus and the smaller thickness of the protective layer, the bigger the stress transfer coefficient. When the FBG is embedded on the right of the designated position, the location function gets big with the increase of the tilt angle. When it is on the left of the designated position, the location function gets small with the increase of the tilt angle.

A new type grapefruit PCF was developed and the fabrication progress of the PCF was analyzed in detail. In terms of making preform, the special tool which was developed to assist to make preform and it improved the consistency of preform. In terms of drawing fiber, the high-precision minute-pressure control system was developed to control the inner pressure of quartz capillary. A mass of experiments indicates that the homogeneous structure, low-loss and high strength grapefruit PCF can be made when temperature between 1 850℃ and 1 900℃ and pressure between 1 500 Pa and 2 000 Pa. The properties of fiber were measured and analyzed that fiber diameter is 130 μm, coating diameter is 250 μm, mode field diameter is 11.27 μm and the loss is 3.5 dB/km at operating wavelength of 1 550 nm. The test result indicates that the developed grapefruit PCF’s parameter of geometry and optics has reached the demand of the engineered application. Furthermore, it establishes the theoretical foundation of making further development on high sensitivity fiber grating.

On the basis of analyzing Moving Average(MA) correction mechanism, random deviations of laser beams are adjusted with the compensation and the moving average of compensation in this paper. Take the progress of adjusting random deviations of pulse laser beams with fast steering mirrors in the beam delivery system as an example. Closed-loop control algorithms for beams stabilization based on MA are introduced. The simulation results are presented, and the correction effects with the ground vibrations or not are illustrated. The outcomes indicate that algorithms based on MA will control the random drifts effectively, which prove that the optimal MA can be reduced to 1/15 times. Meanwhile, these methods which can achieve real-time control are practical. The key of applications lies in construction of the appropriate correction formula.

The response characteristics of HgCdTe photoconductive detector have been discussed in detail. Several main laser irradiation parameters, such as irradiation time, wavelength and optical power density, are chosen to calculate response process of the detector. Based on traditional drift-diffusion model, an equation set with the variation of temperature is deduced to describe the semiconductor carriers’ dynamics features. Using the numerical method, the resistance and the output voltage of the detector have been worked out. The calculation results show that: thermal effect of the semiconductor detector materials become more apparent with the increase of irradiation time and the power density, but not much changes with the wavelength. The output voltage increases with the increase of power density, and eventually become saturated.

Aiming for the cluster eyes, as the rudiment of compound eye, the scheme for calibrating multichannel imaging distortion was presented for target positioning. According to the mathematical models of positioning target and multichannel calibration, by the optical splitter, the verticality between horizontal movement axle of target plane and target plane and the parallelity between target plane and cluster eyes plane were adjusted firstly. After the methods of vanishing points and the common imaging point of different points on the Y-axis were used to obtain initial point and distance, three-dimensional coordinate of every point located on the target plane could be obtained. Finally, after getting the angle between every target and corresponding channels and its imaging center, the corresponding relation between angle of each channel and the imaging center was established. The experimental results show that the scheme can meet the requirement for nonlinear calibration of cluster eyes, and the calibrated angle resolution initially could reach 0.02° and the distance precision for target positioning could be controlled within less than 3%.

A model toward explaining the self-initiated resistance to flashover of insulators in vacuum is proposed, thus the previously underestimated effect of self-initiated magnetic field generated by nanosecond pulsed voltage is taken into account to satisfy the experimental data of flashover voltage of insulators in vacuum, which changes with the variation of pulses' risetime. The data of several experiments is illustrated to be compared with the theoretical calculation of this model, and the differences between the theoretical estimation and the experimental results are expounded. The outcomes of this model can be used to improve the flashover voltage of Photoconductive Semiconductor Switches(PCSSs), which is highlighted in the future development of pulse power equipments.

A novel image registration method is proposed based on non-negative matrix factorization by using the absolute feature vectors of the spectrum of graph. First, the non-negative weight matrices of the undirected weighted graph by the feature points of the images are constructed, from which the feature basis image obtained can contain the global features of the original images using non-negative matrix factorization. The initial value of non-negative matrix factorization is evaluated iteratively using the absolute feature vectors of the spectrum of the non-negative weight matrices, which can reflect the structural characteristics information of the graph, and improve the image matching rate. Finally, the correct feature correspondences are found in the feature basis vectors space between the weighted graphs. The experiments on both synthetic images and real-word images indicate that the proposed method is feasible for image registration.

In order to achieve a better recovery precision, this paper introduces an algorithm for shape from focus based on zero-phase filer. The principles and design of this filter were explained. To filter the evaluation function of window sequence image by a zero-phase filter, it can keep the position of each dimensional data point unchanged while eliminating noise, so as to get a more accurate focusing position. The peak value position of the evaluation function is got by computing the extreme of the least square quadratic curve. At last using the cubic surface interpolation, all the depth of the measurement object is obtained. The experiment shows that the method of this paper is better than the traditional method at flatness.