Based upon the principle that an asymmetric electric field can generate a repulsive force, a micro out-of-plane electrostatic repulsive actuator with a unit dimension of 300 μm is designed and fabricated. The stroke of this kind of actuator is far larger than the traditional attractive actuators for it is not limited by the “Pull-in” phenomenon. The actuator is prepared using a surface micromachining polysilicon processes. To study the dynamic performance of the actuator, an equivalent model of the electrostatic repulsive micro driver is proposed. The squeeze air film damping effect and frequency response of the micro driver are analyzed based upon the numerical method. The static and dynamic characteristics of the actuator are tested using a white light interferometer. The results show that the static displacement of this kind of actuator reaches 2.1 μm at 100 V, and the actuator has a wide working bandwidth of 2 kHz and a fast response ability.