Chinese Journal of Lasers, Volume. 39, Issue 3, 303007(2012)

Subsurface Damage Characterization of Ground Fused Silica by HF Etching Combined with Polishing Layer by Layer

Yang Minghong1,2、*, Zhao Yuan′an1, Yi Kui1, and Shao Jianda1
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(14)

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    [4] [4] T. Suratwala, L. Wong, P. Miller et al.. Sub-surface mechanical damage distributions during grinding of fused silica[J]. Journal of Non-Crystalline Solids, 2006, 352(52-54): 5601~5617

    [5] [5] P. E. Miller, T. I. Suratwala, L. L. Wong et al.. The distribution of subsurface damage in fused silica[C]. SPIE, 2005, 5991: 56~68

    [6] [6] Z. Wang, Y. Wu, Y. Dai et al.. Subsurface damage distribution in the lapping process[J]. Appl. Opt., 2008, 47(10): 1417~1426

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    [8] [8] T. Suratwala, R. Steele, M. D. Feit et al.. Effect of rogue particles on the sub-surface damage of fused silica during grinding/polishing[J]. Journal of Non-Crystalline Solids, 2008, 354(18): 2023~2037

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    [10] [10] Y. Zhou, P. D. Funkenbusch, D. J. Quesnel et al.. Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses[J]. J. Am. Ceram. Soc., 1994, 77(12): 3277~3280

    [11] [11] J. C. Lambropoulos, Y. Li, P. Funkenbusch et al.. Non-contact estimate of grinding subsurface damage[C]. SPIE, 1999, 3782: 41~50

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    [13] [13] J. Neauport, C. Ambard, P. Cormont et al.. Subsurface damage measurement of ground fused silica parts by HF etching techniques[J]. Opt. Express, 2009, 17(22): 20448~20456

    [14] [14] L. Wong, T. Suratwala, M. D. Feit et al.. The effect of HF/NH4F etching on the morphology of surface fractures on fused silica[J]. Journal of Non-Crystalline Solids, 2009, 355(13): 797~810

    CLP Journals

    [1] Yang Minghong, Zhao Yuan′an, Shan Haiyang, Yi Kui, Shao Jianda. Surface Structure Features of Polished Fused Silica Revealed by Etching and Thermal Treating[J]. Chinese Journal of Lasers, 2012, 39(8): 803004

    [2] Jiang Yong, Xiang Xia, Liu Chunming, Yuan Xiaodong, Yang Liang, Yan Zhonghua, Wang Haijun, Liao Wei, Lü Haibing, Zheng Wanguo, Zu Xiaotao. Classification and Elimination of Ablation Debris on the Mitigated Damage Site in Fused Silica Surface[J]. Chinese Journal of Lasers, 2012, 39(12): 1203003

    [3] Guo Yajing, Tang Shunxing, Ji Lailin, Hui Hongchao, Wang Yuyu, Zhu Baoqiang, Lin Zunqi. Experimental Study of Multiple Wavelength Laser-Induced Damage in SiO2 Based on Near Field and Image Segmentation[J]. Acta Optica Sinica, 2013, 33(1): 114001

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    Yang Minghong, Zhao Yuan′an, Yi Kui, Shao Jianda. Subsurface Damage Characterization of Ground Fused Silica by HF Etching Combined with Polishing Layer by Layer[J]. Chinese Journal of Lasers, 2012, 39(3): 303007

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    Paper Information

    Category: laser manufacturing

    Received: Nov. 7, 2011

    Accepted: --

    Published Online: Jan. 17, 2012

    The Author Email: Minghong Yang (yangmh@siom.ac.cn)

    DOI:10.3788/cjl201239.0303007

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