Chinese Journal of Lasers, Volume. 39, Issue 3, 303007(2012)
Subsurface Damage Characterization of Ground Fused Silica by HF Etching Combined with Polishing Layer by Layer
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Yang Minghong, Zhao Yuan′an, Yi Kui, Shao Jianda. Subsurface Damage Characterization of Ground Fused Silica by HF Etching Combined with Polishing Layer by Layer[J]. Chinese Journal of Lasers, 2012, 39(3): 303007
Paper Information
Category: laser manufacturing
Received: Nov. 7, 2011
Accepted: --
Published Online: Jan. 17, 2012
The Author Email: Minghong Yang (yangmh@siom.ac.cn)
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