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Chinese Journal of Lasers, Volume. 39, Issue 3, 303007(2012)

Subsurface Damage Characterization of Ground Fused Silica by HF Etching Combined with Polishing Layer by Layer

Yang Minghong1,2、*, Zhao Yuan′an1, Yi Kui1, and Shao Jianda1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Article index updated: Mar. 10, 2025

    The article is cited by 5 article(s) CLP online library. (Some content might be in Chinese.)
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    Yang Minghong, Zhao Yuan′an, Yi Kui, Shao Jianda. Subsurface Damage Characterization of Ground Fused Silica by HF Etching Combined with Polishing Layer by Layer[J]. Chinese Journal of Lasers, 2012, 39(3): 303007

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    Paper Information

    Category: laser manufacturing

    Received: Nov. 7, 2011

    Accepted: --

    Published Online: Jan. 17, 2012

    The Author Email: Minghong Yang (yangmh@siom.ac.cn)

    DOI:10.3788/cjl201239.0303007

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology