Chinese Optics Letters, Volume. 20, Issue 3, 031302(2022)
Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator
Fig. 1. (a) Scanning electron microscope image of a suspended 1D nanobeam PhC cavity. (b) Zoom-in side view image of the PhC cavity, where th is the slab thickness. (c) Zoom-in top view image of the 1D-PhC cavity. The nominal unit cell is parameterized by a (lattice constant, hole to hole distance), w (beam width), hx (air hole length), and hy(air hole width).
Fig. 2. (a) Experimentally measured PL spectrum (blue line) and 3D-FDTD simulation spectrum (purple line) from a PhC with a lattice constant of 290 nm. Resonance peaks in the simulated spectrum show a good consistence with the experimental results at room temperature, especially the TE-like polarized modes. (b)–(d) 3D finite-element-method (FEM) simulated optical profiles (Ey component) of the (b) TE0, (c) TE1, and (d) TE2 modes.
Fig. 3. (a) PL spectra of 1D-PhC cavities with lattice constants of 270 nm and 290 nm. The fundamental TE-like modes are located at 753.8 nm and 825.4 nm, respectively. (b), (c) Normalized PL spectra and theoretical fitting (red lines) of the TE0 modes for cavities with lattice constants of (b) 270 nm and (c) 290 nm.
Fig. 4. (a) Measured PL spectra as a function of the excitation power. (b) Resonance shift of the TE-like modes (rectangle for TE0, circle for TE2, triangle for TE3) as a function of excitation power.
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Liping Zhou, Chengli Wang, Ailun Yi, Chen Shen, Yifan Zhu, Kai Huang, Min Zhou, Jiaxiang Zhang, Xin Ou, "Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator," Chin. Opt. Lett. 20, 031302 (2022)
Category: Integrated Optics
Received: Nov. 8, 2021
Accepted: Dec. 13, 2021
Posted: Dec. 14, 2021
Published Online: Jan. 11, 2022
The Author Email: Jiaxiang Zhang (jiaxiang.zhang@mail.sim.ac.cn), Xin Ou (ouxin@mail.sim.ac.cn)