Chinese Optics Letters, Volume. 20, Issue 3, 031302(2022)

Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator

Liping Zhou1,2, Chengli Wang1,2, Ailun Yi1,3, Chen Shen1, Yifan Zhu1,2, Kai Huang1, Min Zhou1, Jiaxiang Zhang1,2、*, and Xin Ou1,2、**
Author Affiliations
  • 1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3XOI Technology Co., Ltd., Shanghai 201899, China
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    Figures & Tables(4)
    (a) Scanning electron microscope image of a suspended 1D nanobeam PhC cavity. (b) Zoom-in side view image of the PhC cavity, where th is the slab thickness. (c) Zoom-in top view image of the 1D-PhC cavity. The nominal unit cell is parameterized by a (lattice constant, hole to hole distance), w (beam width), hx (air hole length), and hy(air hole width).
    (a) Experimentally measured PL spectrum (blue line) and 3D-FDTD simulation spectrum (purple line) from a PhC with a lattice constant of 290 nm. Resonance peaks in the simulated spectrum show a good consistence with the experimental results at room temperature, especially the TE-like polarized modes. (b)–(d) 3D finite-element-method (FEM) simulated optical profiles (Ey component) of the (b) TE0, (c) TE1, and (d) TE2 modes.
    (a) PL spectra of 1D-PhC cavities with lattice constants of 270 nm and 290 nm. The fundamental TE-like modes are located at 753.8 nm and 825.4 nm, respectively. (b), (c) Normalized PL spectra and theoretical fitting (red lines) of the TE0 modes for cavities with lattice constants of (b) 270 nm and (c) 290 nm.
    (a) Measured PL spectra as a function of the excitation power. (b) Resonance shift of the TE-like modes (rectangle for TE0, circle for TE2, triangle for TE3) as a function of excitation power.
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    Liping Zhou, Chengli Wang, Ailun Yi, Chen Shen, Yifan Zhu, Kai Huang, Min Zhou, Jiaxiang Zhang, Xin Ou, "Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator," Chin. Opt. Lett. 20, 031302 (2022)

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    Paper Information

    Category: Integrated Optics

    Received: Nov. 8, 2021

    Accepted: Dec. 13, 2021

    Posted: Dec. 14, 2021

    Published Online: Jan. 11, 2022

    The Author Email: Jiaxiang Zhang (jiaxiang.zhang@mail.sim.ac.cn), Xin Ou (ouxin@mail.sim.ac.cn)

    DOI:10.3788/COL202220.031302

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