Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator

Liping Zhou; Chengli Wang; Ailun Yi; Chen Shen; Yifan Zhu; Kai Huang; Min Zhou; Jiaxiang Zhang; Xin Ou

doi:10.3788/COL202220.031302

Chinese Optics Letters, Volume. 20, Issue 3, 031302(2022)

Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator

Liping Zhou^1,2, Chengli Wang^1,2, Ailun Yi^1,3, Chen Shen¹, Yifan Zhu^1,2, Kai Huang¹, Min Zhou¹, Jiaxiang Zhang^1,2、*, and Xin Ou^1,2、**

Author Affiliations

¹State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³XOI Technology Co., Ltd., Shanghai 201899, China

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Liping Zhou, Chengli Wang, Ailun Yi, Chen Shen, Yifan Zhu, Kai Huang, Min Zhou, Jiaxiang Zhang, Xin Ou, "Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator," Chin. Opt. Lett. 20, 031302 (2022)

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Paper Information

Category: Integrated Optics

Received: Nov. 8, 2021

Accepted: Dec. 13, 2021

Posted: Dec. 14, 2021

Published Online: Jan. 11, 2022

The Author Email: Jiaxiang Zhang (jiaxiang.zhang@mail.sim.ac.cn), Xin Ou (ouxin@mail.sim.ac.cn)

DOI:10.3788/COL202220.031302

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