Acta Optica Sinica, Volume. 36, Issue 1, 105003(2016)
High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings
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Si Xinchun, Tang Yan, Hu Song, Liu Junbo, Cheng Yiguang, Hu Tao, Zhou Yi, Deng Qinyuan. High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings[J]. Acta Optica Sinica, 2016, 36(1): 105003
Category: Diffraction and Gratings
Received: Jul. 16, 2015
Accepted: --
Published Online: Dec. 31, 2015
The Author Email: Si Xinchun (xyxido@hotmail.com)