Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Acta Optica Sinica, Volume. 36, Issue 1, 105003(2016)

High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings

Si Xinchun1,2、*, Tang Yan1, Hu Song1, Liu Junbo1,2, Cheng Yiguang1,2, Hu Tao1, Zhou Yi1,2, and Deng Qinyuan1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (15)
    Cited By (3)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    Si Xinchun, Tang Yan, Hu Song, Liu Junbo, Cheng Yiguang, Hu Tao, Zhou Yi, Deng Qinyuan. High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings[J]. Acta Optica Sinica, 2016, 36(1): 105003

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Diffraction and Gratings

    Received: Jul. 16, 2015

    Accepted: --

    Published Online: Dec. 31, 2015

    The Author Email: Xinchun Si (xyxido@hotmail.com)

    DOI:10.3788/aos201636.0105003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology