Acta Optica Sinica, Volume. 36, Issue 1, 105003(2016)

High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings

Si Xinchun1,2、*, Tang Yan1, Hu Song1, Liu Junbo1,2, Cheng Yiguang1,2, Hu Tao1, Zhou Yi1,2, and Deng Qinyuan1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    Cited By

    Article index updated: Mar. 10, 2025

    The article is cited by 3 article(s) CLP online library. (Some content might be in Chinese.)
    Tools

    Get Citation

    Copy Citation Text

    Si Xinchun, Tang Yan, Hu Song, Liu Junbo, Cheng Yiguang, Hu Tao, Zhou Yi, Deng Qinyuan. High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings[J]. Acta Optica Sinica, 2016, 36(1): 105003

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Diffraction and Gratings

    Received: Jul. 16, 2015

    Accepted: --

    Published Online: Dec. 31, 2015

    The Author Email: Xinchun Si (xyxido@hotmail.com)

    DOI:10.3788/aos201636.0105003

    Topics