Acta Optica Sinica, Volume. 41, Issue 20, 2012003(2021)
Degree of Freedom Analysis of Dual-Rotating Compensator Mueller Matrix Ellipsometer Through Calibration Experiments Based on Advanced Parameter Model
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Zhengwei Miao, Yuanyuan Tang, Kai Wei, Yudong Zhang. Degree of Freedom Analysis of Dual-Rotating Compensator Mueller Matrix Ellipsometer Through Calibration Experiments Based on Advanced Parameter Model[J]. Acta Optica Sinica, 2021, 41(20): 2012003
Category: Instrumentation, Measurement and Metrology
Received: Apr. 6, 2021
Accepted: May. 6, 2021
Published Online: Sep. 30, 2021
The Author Email: Tang Yuanyuan (yytang001@126.com)