Degree of Freedom Analysis of Dual-Rotating Compensator Mueller Matrix Ellipsometer Through Calibration Experiments Based on Advanced Parameter Model

Zhengwei Miao; Yuanyuan Tang; Kai Wei; Yudong Zhang

doi:10.3788/AOS202141.2012003

Acta Optica Sinica, Volume. 41, Issue 20, 2012003(2021)

Degree of Freedom Analysis of Dual-Rotating Compensator Mueller Matrix Ellipsometer Through Calibration Experiments Based on Advanced Parameter Model

Zhengwei Miao^1,2,3, Yuanyuan Tang^1,2、*, Kai Wei^1,2, and Yudong Zhang^1,2

Author Affiliations

¹Key Laboratory of Adaptive Optics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China

²Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China

³University of Chinese Academy of Sciences, Beijing 100049, China

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Zhengwei Miao, Yuanyuan Tang, Kai Wei, Yudong Zhang. Degree of Freedom Analysis of Dual-Rotating Compensator Mueller Matrix Ellipsometer Through Calibration Experiments Based on Advanced Parameter Model[J]. Acta Optica Sinica, 2021, 41(20): 2012003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Apr. 6, 2021

Accepted: May. 6, 2021

Published Online: Sep. 30, 2021

The Author Email: Tang Yuanyuan (yytang001@126.com)

DOI:10.3788/AOS202141.2012003

Topics

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Instrumentation, Measurement and Metrology