Degree of Freedom Analysis of Dual-Rotating Compensator Mueller Matrix Ellipsometer Through Calibration Experiments Based on Advanced Parameter Model

Zhengwei Miao; Yuanyuan Tang; Kai Wei; Yudong Zhang

doi:10.3788/AOS202141.2012003

Acta Optica Sinica, Volume. 41, Issue 20, 2012003(2021)

Degree of Freedom Analysis of Dual-Rotating Compensator Mueller Matrix Ellipsometer Through Calibration Experiments Based on Advanced Parameter Model

Zhengwei Miao^1,2,3, Yuanyuan Tang^1,2、*, Kai Wei^1,2, and Yudong Zhang^1,2

Author Affiliations

¹Key Laboratory of Adaptive Optics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China

²Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China

³University of Chinese Academy of Sciences, Beijing 100049, China

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Figures & Tables(7)

Fig. 1. Optical path of DRC-MME

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Fig. 2. Results of degree of freedom simulation experiment. (a) 7 fixed parameters; (b) 8 fixed parameters

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Fig. 3. Setup of home-made DRC-MME

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Fig. 4. Results of straight-through calibration experiment. (a) Fitting results; (b) parameter calibration results of compensator; (c) parameter calibration results of focus lens

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Fig. 5. Straight-through calibration experiment results of original model. (a) Parameter calibration results of compensator; (b) parameter calibration results of focus lens

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Fig. 6. Silicon dioxide film thickness measurement results

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Table 1. Setting parameters of simulation verification experiments

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Table 1. Setting parameters of simulation verification experiments

Parameter	Setting value	Parameter	Setting value	Parameter	Setting value
A	90°(+)	$β_{L_{2}}$	-4°	$δ_{C_{1}}$	90°
P	45°(+)	$μ_{L_{2}}$	-10°	C₂	0°(+)
$α_{L_{1}}$	0°(+)	C₁	0°(+)	$θ_{C_{2}}$	150°
$β_{L_{1}}$	0°(+)	$θ_{C_{1}}$	60°	$ρ_{C_{2}}$	1°
$μ_{L_{1}}$	12°	$ρ_{C_{1}}$	0°(+)	$ε_{C_{2}}$	1
$α_{L_{2}}$	0.8°	$ε_{C_{1}}$	1	$δ_{C_{2}}$	90°

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Zhengwei Miao, Yuanyuan Tang, Kai Wei, Yudong Zhang. Degree of Freedom Analysis of Dual-Rotating Compensator Mueller Matrix Ellipsometer Through Calibration Experiments Based on Advanced Parameter Model[J]. Acta Optica Sinica, 2021, 41(20): 2012003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Apr. 6, 2021

Accepted: May. 6, 2021

Published Online: Sep. 30, 2021

The Author Email: Tang Yuanyuan (yytang001@126.com)

DOI:10.3788/AOS202141.2012003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology