Chinese Optics Letters, Volume. 14, Issue 9, 090501(2016)

Near-field holography enhanced with antireflection coatings—an improved method for fabricating diffraction gratings

Yuanfang Li1... Huoyao Chen1, Stefanie Kroker2,3,4, Thomas Käsebier2, Zhengkun Liu1, Keqiang Qiu1, Ying Liu1,*, Ernst-Bernhard Kley2, Xiangdong Xu1, Yilin Hong1 and Shaojun Fu1 |Show fewer author(s)
Author Affiliations
  • 1National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
  • 2Institut für Angewandte Physik, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, Jena 07743, Germany
  • 3Technische Universität Braunschweig, Laboratory for Emerging Nanometrology, Pockelsstr. 14, Braunschweig 38106, Germany
  • 4Physikalisch-Technische Bundesanstalt, Bundesallee 100, Braunschweig 38116, Germany
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    [2] Jiajia Wang, Zhenhong Jia, Changwu Lv, Yanyu Li, "Application of metal nanoparticles/porous silicon diffraction grating in rhodamine 6 G fluorescence signal enhancement," Chin. Opt. Lett. 15, 110501 (2017)

    [3] Dakui Lin, Huoyao Chen, Zhengkun Liu, Ying Liu. Errors Analysis of Flat-Field Gratings Fabricated by EBL-NFH and Errors Compensation[J]. Acta Optica Sinica, 2018, 38(5): 0505003

    [4] Wenqiang Hua, Guangzhao Zhou, Yuzhu Wang, Ping Zhou, Shumin Yang, Chuanqian Peng, Fenggang Bian, Xiuhong Li, Jie Wang, "Measurement of the spatial coherence of hard synchrotron radiation using a pencil beam," Chin. Opt. Lett. 15, 033401 (2017)

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    Yuanfang Li, Huoyao Chen, Stefanie Kroker, Thomas Käsebier, Zhengkun Liu, Keqiang Qiu, Ying Liu, Ernst-Bernhard Kley, Xiangdong Xu, Yilin Hong, Shaojun Fu, "Near-field holography enhanced with antireflection coatings—an improved method for fabricating diffraction gratings," Chin. Opt. Lett. 14, 090501 (2016)

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    Paper Information

    Category: Diffraction and Gratings

    Received: Apr. 20, 2016

    Accepted: Jul. 8, 2016

    Published Online: Aug. 3, 2018

    The Author Email: Ying Liu (liuychch@ustc.edu.cn)

    DOI:10.3788/COL201614.090501

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