Chinese Journal of Lasers, Volume. 41, Issue 8, 816001(2014)

Study on the Fabrication of the High Accuracy Optical Aspherical Mirror with Atmospheric Pressure Inductively Coupled Plasma Chemical Etching Technology

Wang Xu*
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    Wang Xu. Study on the Fabrication of the High Accuracy Optical Aspherical Mirror with Atmospheric Pressure Inductively Coupled Plasma Chemical Etching Technology[J]. Chinese Journal of Lasers, 2014, 41(8): 816001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Feb. 11, 2014

    Accepted: --

    Published Online: Jun. 13, 2014

    The Author Email: Xu Wang (wangxu-308@163.com)

    DOI:10.3788/cjl201441.0816001

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