Chinese Journal of Lasers, Volume. 41, Issue 8, 816001(2014)
Study on the Fabrication of the High Accuracy Optical Aspherical Mirror with Atmospheric Pressure Inductively Coupled Plasma Chemical Etching Technology
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Wang Xu. Study on the Fabrication of the High Accuracy Optical Aspherical Mirror with Atmospheric Pressure Inductively Coupled Plasma Chemical Etching Technology[J]. Chinese Journal of Lasers, 2014, 41(8): 816001
Paper Information
Category: Optical Design and Fabrication
Received: Feb. 11, 2014
Accepted: --
Published Online: Jun. 13, 2014
The Author Email: Xu Wang (wangxu-308@163.com)
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