Chinese Journal of Lasers, Volume. 49, Issue 6, 0603003(2022)

Picosecond Pulsed Laser Deposition Technique to Fabricate Zinc-Oxide Thin Films Through Burst Mode

Enli Wu1,2, Shoujun Dai1,2,3, Xinxiang Xuan4, Jianguo He1,2,3, Yang Liu1,2,3, Yu Tan5, Zeqiang Mo1,2,3, and Jin Yu1,2、*
Author Affiliations
  • 1Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Key Laboratory of Computational Optical Imaging Technology, Chinese Academy of Sciences, Beijing 100094, China
  • 4No.3 Research Institute, China Electronics Technology Group Corporation, Beijing 100015, China
  • 5Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an, Shaanxi 710119, China
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    References(54)

    [1] Deng Z Y, Jia Q, Feng B et al. Research progress on fabrication and applications of high-performance films by pulsed laser deposition[J]. Chinese Journal of Lasers, 48, 0802010(2021).

    [2] Sharma A K, Thareja R K, Willer U et al. Phase transformation in room temperature pulsed laser deposited TiO2 thin films[J]. Applied Surface Science, 206, 137-148(2003).

    [3] Craciun V, Amirhaghi S, Craciun D et al. Effects of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition[J]. Applied Surface Science, 86, 99-106(1995).

    [4] Ebihara K, Ohshima T, Ikegami T et al. Co-doping deposition of p-type ZnO thin films using KrF excimer laser ablation[J]. MRS Online Proceedings Library, 747, 1-6(2003).

    [5] Franklin J B, Zou B, Petrov P et al. Optimised pulsed laser deposition of ZnO thin films on transparent conducting substrates[J]. Journal of Materials Chemistry, 21, 8178-8182(2011).

    [6] Golalikhani M, Lei Q Y, Chen G et al. Stoichiometry of LaAlO3 films grown on SrTiO3 by pulsed laser deposition[J]. Journal of Applied Physics, 114, 027008(2013).

    [7] Garrelie F, Bourquard F, Loir A S et al. Control of femtosecond pulsed laser ablation and deposition by temporal pulse shaping[J]. Optics & Laser Technology, 78, 42-51(2016).

    [8] Kudryashov S I, Samokhvalov A A, Golubev Y D et al. Dynamic all-optical control in ultrashort double-pulse laser ablation[J]. Applied Surface Science, 537, 147940(2021).

    [9] Yang H M, Ren X D, Zheng L M et al. Deposition of nano-diamond film by double beam pulse laser irradiation of graphite suspension[J]. Chinese Journal of Lasers, 41, 0507001(2014).

    [10] Bourquard F, Tite T, Loir A S et al. Control of the graphite femtosecond ablation plume kinetics by temporal laser pulse shaping: effects on pulsed laser deposition of diamond-like carbon[J]. The Journal of Physical Chemistry C, 118, 4377-4385(2014).

    [11] Ristoscu C, Socol G, Ghica C et al. Femtosecond pulse shaping for phase and morphology control in PLD: synthesis of cubic SiC[J]. Applied Surface Science, 252, 4857-4862(2006).

    [12] Guillermin M, Klini A, Colombier J P et al. Tuning spectral properties of ultrafast laser ablation plasmas from brass using adaptive temporal pulse shaping[J]. Optics Express, 18, 11159-11172(2010).

    [13] Piepmeier E H, Malmstadt H V. Q-switched laser energy absorption in the plume of an aluminum alloy[J]. Analytical Chemistry, 41, 700-707(1969).

    [14] Scott R H, Strasheim A. Time-resolved direct-reading spectrochemical analysis using a laser source with medium pulse-repetition rate[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 26, 707-719(1971).

    [15] Galbács G, Jedlinszki N, Herrera K et al. A study of ablation, spatial, and temporal characteristics of laser-induced plasmas generated by multiple collinear pulses[J]. Applied Spectroscopy, 64, 161-172(2010).

    [16] Hartmann C, Gillner A, Aydin Ü et al. Investigation on laser micro ablation of metals using ns-multi-pulses[J]. Journal of Physics: Conference Series, 59, 440-444(2007).

    [17] Jedlinszki N, Galbács G. An evaluation of the analytical performance of collinear multi-pulse laser induced breakdown spectroscopy[J]. Microchemical Journal, 97, 255-263(2011).

    [18] Peñaloza-Mendoza Y, Ponce-Cabrera L. Comparison on morphological and optical properties of TiO2 thin films grown by single-pulse and multi-pulse laser ablation[J]. Journal of Surface Engineered Materials and Advanced Technology, 5, 17-23(2015).

    [19] Kekkonen V, Chaudhuri S, Clarke F et al. Picosecond pulsed laser deposition of metal-oxide sensing layers with controllable porosity for gas sensor applications[J]. Applied Physics A, 122, 1-7(2016).

    [20] Dai S J, Yu J, Mo Z Q et al. Particulate control technology based on pulsed laser deposition[J]. Laser & Optoelectronics Progress, 58, 0100004(2021).

    [21] Gamaly E G, Rode A V. Physics of ultra-short laser interaction with matter: from phonon excitation to ultimate transformations[J]. Progress in Quantum Electronics, 37, 215-323(2013).

    [22] Sundaram S K, Mazur E. Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses[J]. Nature Materials, 1, 217-224(2002).

    [23] Amoruso S, Ausanio G, Bruzzese R et al. Femtosecond laser pulse irradiation of solid targets as a general route to nanoparticle formation in a vacuum[J]. Physical Review B, 71, 033406(2005).

    [24] Balling P, Schou J. Femtosecond-laser ablation dynamics of dielectrics: basics and applications for thin films[J]. Reports on Progress in Physics, 76, 036502(2013).

    [25] Dai S J, Yu J, Mo Z Q et al. Influence of double pulse ablation on the film topography in picosecond pulsed laser deposition of nickel[J]. Applied Physics Express, 13, 035505(2020).

    [26] Tang Z K, Wong G K L, Yu P et al. Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films[J]. Applied Physics Letters, 72, 3270-3272(1998).

    [27] Wang L P, Wang B, Li G S et al. Nanomaterials prepared via pulsed laser processes[J]. Laser & Optoelectronics Progress, 58, 0900007(2021).

    [28] Yu J, Yang M, Li Z et al. Hierarchical particle-in-quasicavity architecture for ultratrace in situ Raman sensing and its application in real-time monitoring of toxic pollutants[J]. Analytical Chemistry, 92, 14754-14761(2020).

    [29] Chen J B, Wang L, Su X Q et al. Affect of ZnO thin film of pulsed laser deposition by substrate temperatures[J]. Chinese Journal of Lasers, 36, 1539-1544(2009).

    [30] Wisz G, Virt I, Sagan P et al. Structural, optical and electrical properties of zinc oxide layers produced by pulsed laser deposition method[J]. Nanoscale Research Letters, 12, 1-7(2017).

    [31] Lemlikchi S, Abdelli-Messaci S, Lafane S et al. Study of structural and optical properties of ZnO films grown by pulsed laser deposition[J]. Applied Surface Science, 256, 5650-5655(2010).

    [32] Dai S J, Yu J, Mo Z Q et al. Uniform and smooth molybdenum film produced through picosecond pulsed laser deposition[J]. Journal of Vacuum Science & Technology A, 37, 061506(2019).

    [33] Radziemski L, Cremers D. A brief history of laser-induced breakdown spectroscopy: from the concept of atoms to LIBS 2012[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 87, 3-10(2013).

    [34] Amoruso S, Ausanio G, Barone A C et al. Ultrashort laser ablation of solid matter in vacuum: a comparison between the picosecond and femtosecond regimes[J]. Journal of Physics B, 38, L329-L338(2005).

    [35] Amoruso S, Ausanio G, Bruzzese R et al. Characterization of laser ablation of solid targets with near-infrared laser pulses of 100 fs and 1 ps duration[J]. Applied Surface Science, 252, 4863-4870(2006).

    [36] Krstulović N, Salamon K, Modic M et al. Dynamics of double-pulse laser produced titanium plasma inferred from thin film morphology and optical emission spectroscopy[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 107, 67-74(2015).

    [37] Dai S J, Yu J, He J G et al. Improvement of Al thin film morphology with picosecond pulsed laser deposition in burst mode[J]. Applied Physics Express, 14, 075501(2021).

    [38] Bruncko J, Šutta P, Netrvalová M et al. Pulsed laser deposition of Ga doped ZnO films: influence of deposition temperature and laser pulse frequency on structural, optical and electrical properties[J]. Vacuum, 159, 134-140(2019).

    [39] Tsoutsouva M G, Panagopoulos C N, Papadimitriou D et al. ZnO thin films prepared by pulsed laser deposition[J]. Materials Science and Engineering B, 176, 480-483(2011).

    [40] Mo G K, Liu J H, Zou Z L et al. Preparation of low-resistivity GZO thin films using pulsed laser deposition and investigation of optoelectronic properties[J]. Chinese Journal of Lasers, 46, 1003001(2019).

    [41] de León J A G, Pérez-Centeno A, Gómez-Rosas G et al. Influence of the Zn plasma kinetics on the structural and optical properties of ZnO thin films grown by PLD[J]. SN Applied Sciences, 1, 1-7(2019).

    [42] Raid A I, Rasheed B G, Salm E T et al. Transparent and conducting ZnO films prepared by reactive pulsed laser deposition[J]. Journal of Materials Science: Materials in Electronics, 18, 397-400(2007).

    [43] Fan X M, Lian J S, Jiang Q et al. Effect of the oxygen pressure on the photoluminescence properties of ZnO thin films by PLD[J]. Journal of Materials Science, 42, 2678-2683(2007).

    [44] Alvira F C, Cabrera L P, Mendoza Y P et al. Pulsed laser deposition of PbTe under monopulse and multipulse regime[J]. Optics and Lasers in Engineering, 90, 284-290(2017).

    [45] Park K S, Park J K. Effect of thin film stress on the elastic strain energy of Cr thin film on substrate[J]. Acta Materialia, 47, 2177-2184(1999).

    [46] Angappane S, Selvi N R, Kulkarni G U. ZnO (101) films by pulsed reactive crossed-beam laser ablation[J]. Bulletin of Materials Science, 32, 253-258(2009).

    [47] Quiñones-Galván J G, Camps E, Campos-González E et al. Influence of plasma parameters and substrate temperature on the structural and optical properties of CdTe thin films deposited on glass by laser ablation[J]. Journal of Applied Physics, 118, 125304(2015).

    [48] Quiñones-Galván J G, Lozada-Morales R, Jiménez-Sandoval S et al. Physical properties of a non-transparent cadmium oxide thick film deposited at low fluence by pulsed laser deposition[J]. Materials Research Bulletin, 76, 376-383(2016).

    [49] Kumar V, Singh S K, Sharma H et al. Investigation of structural and optical properties of ZnO thin films of different thickness grown by pulsed laser deposition method[J]. Physica B, 552, 221-226(2019).

    [50] Shewale P S, Lee S H, Yu Y S. Pulse repetition rate dependent structural, surface morphological and optoelectronic properties of Ga-doped ZnO thin films grown by pulsed laser deposition[J]. Journal of Alloys and Compounds, 725, 1106-1114(2017).

    [51] Shin H H, Joung Y H, Kang S J. Influence of the substrate temperature on the optical and electrical properties of Ga-doped ZnO thin films fabricated by pulsed laser deposition[J]. Journal of Materials Science: Materials in Electronics, 20, 704-708(2008).

    [52] Singh P, Kaur D. Room temperature growth of nanocrystalline anatase TiO2 thin films by dc magnetron sputtering[J]. Physica B, 405, 1258-1266(2010).

    [53] Zhong A H, Tan J, Huang H L et al. Thickness effect on the evolution of morphology and optical properties of ZnO films[J]. Applied Surface Science, 257, 4051-4055(2011).

    [54] Lin S S, Huang J L. Effect of thickness on the structural and optical properties of ZnO films by r.f. magnetron sputtering[J]. Surface and Coatings Technology, 185, 222-227(2004).

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    Enli Wu, Shoujun Dai, Xinxiang Xuan, Jianguo He, Yang Liu, Yu Tan, Zeqiang Mo, Jin Yu. Picosecond Pulsed Laser Deposition Technique to Fabricate Zinc-Oxide Thin Films Through Burst Mode[J]. Chinese Journal of Lasers, 2022, 49(6): 0603003

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    Paper Information

    Received: Jul. 12, 2021

    Accepted: Aug. 20, 2021

    Published Online: Mar. 2, 2022

    The Author Email: Yu Jin (jinyu@aoe.ac.cn)

    DOI:10.3788/CJL202249.0603003

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