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Chinese Journal of Lasers, Volume. 49, Issue 6, 0603003(2022)

Picosecond Pulsed Laser Deposition Technique to Fabricate Zinc-Oxide Thin Films Through Burst Mode

Enli Wu1,2, Shoujun Dai1,2,3, Xinxiang Xuan4, Jianguo He1,2,3, Yang Liu1,2,3, Yu Tan5, Zeqiang Mo1,2,3, and Jin Yu1,2、*
Author Affiliations
  • 1Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Key Laboratory of Computational Optical Imaging Technology, Chinese Academy of Sciences, Beijing 100094, China
  • 4No.3 Research Institute, China Electronics Technology Group Corporation, Beijing 100015, China
  • 5Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an, Shaanxi 710119, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (12)
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    References (54)
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    Figures & Tables(12)
    Schematic of principle of picosecond laser

    Fig. 1. Schematic of principle of picosecond laser

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    Output waveforms of picosecond laser deposited under different burst modes. (a) n＝1; (b) n＝2; (c) n＝3; (d) n＝4

    Fig. 2. Output waveforms of picosecond laser deposited under different burst modes. (a) n＝1; (b) n＝2; (c) n＝3; (d) n＝4

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    Linear deposition rate curves of ZnO films deposited under different burst modes

    Fig. 3. Linear deposition rate curves of ZnO films deposited under different burst modes

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    Roughness as a function of laser shots of ZnO films made by different burst modes

    Fig. 4. Roughness as a function of laser shots of ZnO films made by different burst modes

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    AFM images of ZnO thin films deposited under different burst modes. (a) n＝1; (b) n＝2; (c) n＝3; (d) n＝4

    Fig. 5. AFM images of ZnO thin films deposited under different burst modes. (a) n＝1; (b) n＝2; (c) n＝3; (d) n＝4

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    SEM morphologies and particle size distribution histograms for ZnO films deposited under different burst modes. (a) n＝1; (b) n＝2; (c) n＝3; (d) n＝4

    Fig. 6. SEM morphologies and particle size distribution histograms for ZnO films deposited under different burst modes. (a) n＝1; (b) n＝2; (c) n＝3; (d) n＝4

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    XRD patterns of ZnO films deposited under different burst modes

    Fig. 7. XRD patterns of ZnO films deposited under different burst modes

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    Optical transmittance of ZnO thin films deposited under different burst modes

    Fig. 8. Optical transmittance of ZnO thin films deposited under different burst modes

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    Optical band gaps of ZnO thin films deposited under different burst modes

    Fig. 9. Optical band gaps of ZnO thin films deposited under different burst modes

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    Curve of resistivity of ZnO films as a function of number of burst modes

    Fig. 10. Curve of resistivity of ZnO films as a function of number of burst modes

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    • Table 1. Refractive indices and extinction coefficients of ZnO films prepared with different laser shots and different burst modes at λ＝532 nm

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      Table 1. Refractive indices and extinction coefficients of ZnO films prepared with different laser shots and different burst modes at λ＝532 nm

      Burst modeLaser shot of 6.0×107Laser shot of 7.8×107Laser shot of 9.0×107
      Refractive indexExtinction coefficientRefractive indexExtinction coefficientRefractive indexExtinction coefficient
      n＝11.6320.0211.6230.0171.6180.005
      n＝21.6940.0271.6840.0251.6780.022
      n＝31.7860.0401.7660.0391.7630.032
      n＝41.8530.0751.8100.0721.7980.042

    • Table 2. Microscopic characteristics parameters of ZnO films under different burst modes

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      Table 2. Microscopic characteristics parameters of ZnO films under different burst modes

      Burst mode2θ /(°)FWHM /(°)Lattice constant c/(10－10 m)Crystal size /nm
      n＝136.2150.4925.2079417.3
      n＝236.2360.5125.2029116.7
      n＝336.2560.5095.1954816.8
      n＝436.3360.4785.1896717.9
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    Enli Wu, Shoujun Dai, Xinxiang Xuan, Jianguo He, Yang Liu, Yu Tan, Zeqiang Mo, Jin Yu. Picosecond Pulsed Laser Deposition Technique to Fabricate Zinc-Oxide Thin Films Through Burst Mode[J]. Chinese Journal of Lasers, 2022, 49(6): 0603003

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    Paper Information

    Received: Jul. 12, 2021

    Accepted: Aug. 20, 2021

    Published Online: Mar. 2, 2022

    The Author Email: Yu Jin (jinyu@aoe.ac.cn)

    DOI:10.3788/CJL202249.0603003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology