Picosecond Pulsed Laser Deposition Technique to Fabricate Zinc-Oxide Thin Films Through Burst Mode

Enli Wu; Shoujun Dai; Xinxiang Xuan; Jianguo He; Yang Liu; Yu Tan; Zeqiang Mo; Jin Yu

doi:10.3788/CJL202249.0603003

Chinese Journal of Lasers, Volume. 49, Issue 6, 0603003(2022)

Picosecond Pulsed Laser Deposition Technique to Fabricate Zinc-Oxide Thin Films Through Burst Mode

Enli Wu^1,2, Shoujun Dai^1,2,3, Xinxiang Xuan⁴, Jianguo He^1,2,3, Yang Liu^1,2,3, Yu Tan⁵, Zeqiang Mo^1,2,3, and Jin Yu^1,2、*

Author Affiliations

¹Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China

²University of Chinese Academy of Sciences, Beijing 100049, China

³Key Laboratory of Computational Optical Imaging Technology, Chinese Academy of Sciences, Beijing 100094, China

⁴No.3 Research Institute, China Electronics Technology Group Corporation, Beijing 100015, China

⁵Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an, Shaanxi 710119, China

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Enli Wu, Shoujun Dai, Xinxiang Xuan, Jianguo He, Yang Liu, Yu Tan, Zeqiang Mo, Jin Yu. Picosecond Pulsed Laser Deposition Technique to Fabricate Zinc-Oxide Thin Films Through Burst Mode[J]. Chinese Journal of Lasers, 2022, 49(6): 0603003

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Paper Information

Received: Jul. 12, 2021

Accepted: Aug. 20, 2021

Published Online: Mar. 2, 2022

The Author Email: Yu Jin (jinyu@aoe.ac.cn)

DOI:10.3788/CJL202249.0603003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology