Journal of Synthetic Crystals, Volume. 54, Issue 7, 1208(2025)

Research Progress on Epitaxial Growth of All-Inorganic Halide Perovskite Thin Films

Yansu SHAN1, Xingmu LI1, Xia WANG2, Dehua WU3, and Bingqiang CAO1、*
Author Affiliations
  • 1School of Materials Science and Engineering,University of Jinan,Jinan 250002,China
  • 2School of Physics and Technology,University of Jinan,Jinan 250002,China
  • 3Shandong Inspur Huaguang Optoelectronics Co. ,Ltd. ,Jinan 250002,China
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    Figures & Tables(11)
    Cubic-phase inorganic halide perovskite structures[33]. (a) ABX3-type cubic single perovskite structure, where A-site cations are surrounded by corner-sharing B2+X6 octahedra; (b) A2B+B3+X6-type double perovskite structure, where A-site cations are surrounded by alternating B+X6 and B3+X6 octahedra
    Lattice registration modes in epitaxial growth[37]. (a) Commensurate registry; coincident registry (b) and incommensurate registry (c). Coincident registry and incommensurate registry belong to the “quasiepitaxial” regime due to their higher lattice mismatch
    Epitaxial thin films of CsSnBr3 and CsSnI3. (a) In situ reflection high-energy electron diffraction characterization of cubic-phase CsSnBr3 perovskite film during epitaxial growth on NaCl substrate; (b) top-view and side-view images of cubic-phase CsSnBr3 on epitaxial thin films[41]; (c) reflection high-energy electron diffraction patterns of the KCl substrate and CsSnI3; (d) pole figure of CsSnI3 epitaxial film[42]; (e) XRD scans of CsSnBr3 and CsPbBr3 epitaxial films, left insets: optical photographs of 1 cm×1 cm epitaxial films. Right inset: rocking curve of the reflection for CsSnBr3 film; (f) SEM images of halide perovskite epitaxial films; (g) photo-dember effect in CsPbBr3 epitaxial thin films, showing the electron-hole concentration distribution along the film thickness direction at different time points after photoexcitation, the inset illustrates the distinct transport trajectories of fast and slow carriers using a damped cosine function
    Epitaxial growth of CsPbBr3 thin films on STO substrates[44]. (a) Schematic illustration of lattice matching between CsPbBr3 (100) and STO (100) planes; (b) XRD patterns of epitaxially grown CsPbBr3 film, inset shows a magnified view of the 13°~32° range for the CsPbBr3/STO (100) sample; (c) optical image of CsPbBr3 nanosheets; (d) SEM image of CsPbBr3 epitaxial film
    (a) Reciprocal space mapping of the CsPbBr3 thin film and NaCl (224) peak in the CsPbBr3/graphene/NaCl epitaxial heterostructure[50]; (b) top: SEM image and bottom: optical photograph of epitaxial CsPbBr3 films on Graphene /CaF2[50]; (c) schematic illustration of atomic nucleation processes during the initial stages of ionic epitaxy and remote epitaxy[50]; (d) schematic illustration of remote epitaxial growth of perovskites using a sapphire substrate[49]; (e) TEM image of epitaxial CsPbBr3 film[49]; (f) optical images of epitaxial perovskite films (CsPbCl3, CsPbCl1.3Br1.7, CsPbBr3, CsPbBr2.1I0.9, and CsPbBrI2)[49]; (g) schematic diagram of the perovskite micro-LED display; (h) static image from the perovskite micro-LED display; (i) video frame of the perovskite micro-LED display
    Fabrication of large-area CsPbBr3 perovskite films via magnetron sputtering [59]. (a) Photograph and (b) schematic diagram of magnetron-sputtered large-area CsPbBr3 films; (c) ultrafast dynamics study and (d) transient absorption spectra at different delay times for intrinsic CsPbBr3 films, demonstrating the absence of defect states; (e) absorption spectra; (f) photoluminescence spectra, and fluorescence lifetime decay profiles of intrinsic films; (g) temperature-dependent resistivity measurements and (h) thermal activation model fitting for CsPbBr3 films, yielding an activation energy of 2.24 eV
    (a) XRD patterns of epitaxial films with varying halide ratios[51], (b) reciprocal space mapping of the CsPbIBr2 film along the (001) orientation[51], (c) steady-state photoluminescence spectra of CsPbI2Br films deposited on different substrates[51], (d) energy band diagrams of the p-Si/n-CsPbBr3 epitaxial film heterojunction under 520 nm and 650 nm laser illumination[53], (e) cross-sectional TEM image of the CsPbBr3 film on a Si substrate, and magnified TEM view of the white-boxed region, revealing an interface between Si and CsPbBr3 with a ~2 nm transition layer[53], (f) I-V curves of the p-Si/n-CsPbBr3 epitaxial heterojunction photodetector[53]; (g) photocurrent and external quantum efficiency curve of the p-Si/n-CsPbBr3 photodetector[53]
    Double perovskite Cs2AgBiBr6 epitaxial films and photodetectors[54]. (a) Schematic illustration of lattice matching between the Cs2AgBiBr6 (100) and STO (100) planes; (b) reciprocal space mapping of the epitaxial Cs2AgBiBr6 film along the (100) orientation; (c) SEM image of the epitaxial Cs2AgBiBr6 film; (d) schematic of the optoelectronic device based on the Cs2AgBiBr6 epitaxial film; (e) I-V curves of device at varying irradiation power densities
    (a) Optical images of the α-FAPbI3 epitaxial film. Scale bar: 4 mm[63],(b) cross-sectional SEM image of the α-FAPbI3 epitaxial film. Scale bar: 2 μm[63], (c) (104) asymmetric reciprocal space mapping of α-FAPbI3 on different substrates[63], (d) I-V characteristics of the Au/α-FAPbI3/ITO photoconductive structure photodetector[63], (e) SEM image of CsPbBr3 on STO (100)[64], (f) SEM image of PbI2 on Au/Si (111)[64], (g) optical image of NaCl on Au/Ag/Si (100)[64]
    (a) SEM image and (b) pole figure of epitaxial CsPbBr3 films[55]; (c) FET device structure schematic diagram[55]; (d) scan transfer curves of the FET device[55]; (e) top: optical image of a Cs3Bi2Br9 single-crystal substrate[56]; bottom: optical image of the heterostructure; (f) XRD pole figure of the epitaxial Cs2AgBiBr6 single-crystal film along the (001) orientation, (g) dark current drift of heterostructure and Cs3Bi2Br9 under an electric field of 660 V·mm-1; (h) current density versus dose rate dependence of the heterostructure detector under varying electric fields[56]
    • Table 1. Summary of epitaxial growth of all-inorganic halide perovskites

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      Table 1. Summary of epitaxial growth of all-inorganic halide perovskites

      生长方法材料衬底器件类型性能外延失配度参考文献
      反应性气相沉积CsSnBr3NaCl外延,2.8%41
      反应性气相沉积CsSnBr3NaCl∶NaBr=1∶1外延,0.01%41
      反应性气相沉积CsSnI3KCl外延,0.01%42
      化学气相沉积CsSnBr3NaCl外延,2.8%43
      化学气相沉积CsPbBr3NaCl外延,3.9%43
      化学气相沉积CsPbBr3SrTiO3准外延44
      化学气相沉积CsPbBr3PbS可见光探测器R: 15 A/W, D: 2.65×1011 Jones, RT: 102/96 ms(450 nm, 5 V)外延45
      化学气相沉积CsPbBr3Muscovite准外延46
      化学气相沉积CsSnBr3Au准外延47
      分子束外延CsPbBr3/CsSnBr3Au准外延48
      远程外延CsPbBr3SapphireMicro-LEDEQE: 16.7%, brightness:4.0×10⁵ cd·m-2, Pixel size: 4 μm外延,0.97%49
      远程外延CsPbBr3NaCl外延, 3.9%50
      远程外延CsPbBr3CaF2外延,6.0%50
      脉冲激光沉积CsPbX3SrTiO3准外延51
      脉冲激光沉积CsPbBr3Muscovite可见光探测器R: 0.16 A/W, D: 2.41×1014 Jones, RT: 44.1/42.8 μs(405 nm, 10 V)准外延52
      脉冲激光沉积CsPbBr3Si可见光探测器R: 780 mA/W, D: 6.78 × 1011 Jones, RT: 4.2/6.5 ms(520 nm, 5 V)准外延53
      脉冲激光沉积Cs2AgBrBr6SrTiO3可见光探测器R: 12.1 A/W, 4.63×1012 Jones, Response time: 0.1/0.16 ms(530 nm, 5 V)准外延54
      溶液外延CsPbBr3SrTiO3FETHole mobility: 3.9 cm2 V-1·s-1, On/Off: 105准外延55
      溶液外延Cs2AgBiBr6Cs3Bi2Br9X射线探测器Sensitivity: 1 390 µC·Gyair-1·cm-2, Detection limit: 37.48 nGyair·s-1外延,0.4%56
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    Yansu SHAN, Xingmu LI, Xia WANG, Dehua WU, Bingqiang CAO. Research Progress on Epitaxial Growth of All-Inorganic Halide Perovskite Thin Films[J]. Journal of Synthetic Crystals, 2025, 54(7): 1208

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    Paper Information

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    Received: Apr. 26, 2025

    Accepted: --

    Published Online: Aug. 28, 2025

    The Author Email: Bingqiang CAO (mse_caobq@ujn.edu.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2025.0096

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