Fig. 1. Principle of aspherical surface measurement by CGH

Fig. 2. Schematic of pattern position error

Fig. 3. Schematic of diffraction wavefronts for multiple structure CGH emitting three wavefronts simultaneously

Fig. 4. Equivalent linewidth of CGH diffraction aspherical wavefront along different directions. (a) X direction; (b) Y direction

Fig. 5. Photo of aspherical surface test equipment

Fig. 6. Distribution of surface form for different standard lenses. (a) TF standard lens; (b) RF standard lens

Fig. 7. Distribution of surface form of six tests. (a) Test 2; (b) test 3; (c) test 4; (d) test 5; (e) test 6

Fig. 8. Aspherical surface form distribution calculated with triple complex phase CGH by removing systematic errors

Fig. 9. Aspherical surface form distribution based on refraction null compensation