Triple Complex Phase Computer-Generated Holograms for Aspherical Surface Testing in Extreme Ultraviolet Lithography

Haitao Zhang; Changqing Xie

doi:10.3788/AOS240476

Acta Optica Sinica, Volume. 44, Issue 14, 1412003(2024)

Triple Complex Phase Computer-Generated Holograms for Aspherical Surface Testing in Extreme Ultraviolet Lithography

Haitao Zhang^1,2,3 and Changqing Xie^1、*

¹State Key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China

²School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China

³Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, Jilin , China

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Haitao Zhang, Changqing Xie. Triple Complex Phase Computer-Generated Holograms for Aspherical Surface Testing in Extreme Ultraviolet Lithography[J]. Acta Optica Sinica, 2024, 44(14): 1412003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Jan. 10, 2024

Accepted: Mar. 28, 2024

Published Online: Jul. 4, 2024

The Author Email: Changqing Xie (xiechangqing@ime.ac.cn)

DOI:10.3788/AOS240476

CSTR:32393.14.AOS240476

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