Acta Optica Sinica, Volume. 44, Issue 14, 1412003(2024)
Triple Complex Phase Computer-Generated Holograms for Aspherical Surface Testing in Extreme Ultraviolet Lithography
Article index updated: Sep. 6, 2025
Get Citation
Copy Citation Text
Haitao Zhang, Changqing Xie. Triple Complex Phase Computer-Generated Holograms for Aspherical Surface Testing in Extreme Ultraviolet Lithography[J]. Acta Optica Sinica, 2024, 44(14): 1412003
Category: Instrumentation, Measurement and Metrology
Received: Jan. 10, 2024
Accepted: Mar. 28, 2024
Published Online: Jul. 4, 2024
The Author Email: Changqing Xie (xiechangqing@ime.ac.cn)
CSTR:32393.14.AOS240476