Source Mask Optimization Based on Dynamic Fitness Function

Acta Optica Sinica, Volume. 36, Issue 1, 111006(2016)

Yang Chaoxing^1,2、*, Li Sikun^1,2, and Wang Xiangzhao^1,2

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¹[in Chinese]

²[in Chinese]

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Yang Chaoxing, Li Sikun, Wang Xiangzhao. Source Mask Optimization Based on Dynamic Fitness Function[J]. Acta Optica Sinica, 2016, 36(1): 111006

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Paper Information

Category: Imaging Systems

Received: Jun. 11, 2015

Accepted: --

Published Online: Dec. 25, 2015

The Author Email: Chaoxing Yang (yangcoloy@siom.ac.cn)

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