Acta Optica Sinica, Volume. 36, Issue 1, 111006(2016)
Source Mask Optimization Based on Dynamic Fitness Function
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Yang Chaoxing, Li Sikun, Wang Xiangzhao. Source Mask Optimization Based on Dynamic Fitness Function[J]. Acta Optica Sinica, 2016, 36(1): 111006
Paper Information
Category: Imaging Systems
Received: Jun. 11, 2015
Accepted: --
Published Online: Dec. 25, 2015
The Author Email: Yang Chaoxing (yangcoloy@siom.ac.cn)
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