Acta Optica Sinica, Volume. 36, Issue 1, 111006(2016)
Source Mask Optimization Based on Dynamic Fitness Function
Cited By
Article index updated: Sep. 6, 2025
The article is cited by 5 article(s) CLP online library. (Some content might be in Chinese.)
Tools
Get Citation
Copy Citation Text
Yang Chaoxing, Li Sikun, Wang Xiangzhao. Source Mask Optimization Based on Dynamic Fitness Function[J]. Acta Optica Sinica, 2016, 36(1): 111006
Paper Information
Category: Imaging Systems
Received: Jun. 11, 2015
Accepted: --
Published Online: Dec. 25, 2015
The Author Email: Yang Chaoxing (yangcoloy@siom.ac.cn)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20