Journal of Infrared and Millimeter Waves, Volume. 43, Issue 3, 329(2024)

InGaAs/InAlAs InP-based HEMT with the current cutoff frequency of 441 GHz

Rui-Ze FENG1,2, Shu-Rui CAO1,2, Zhi-Yu FENG1,2, Fu-Gui ZHOU1,2, Tong LIU1, Yong-Bo SU1,2, and Zhi JIN1,2、*
Author Affiliations
  • 1High-Frequency High-Voltage Device and Integrated Circuits Center,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China
  • 2School of Integrated Circuits,University of Chinese Academy of Sciences,Beijing 100049,China
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    Figures & Tables(8)
    A schematic cross-section of InP-based HEMT
    The EBL process with a PMMA/Al/UVIII resist stack
    SEM photograph of the T-Gate and gate recess of the InGaAs/InAlAs HEMT
    (a) DC output characteristics, (b) gm against IDS, and (c) transfer characteristics of the HEMT
    (a) The measured and modeled H21, MAG/MSG and U gains versus frequency for the Lg = 54.4 nm InGaAs/InAlAs HEMT at VGS = -0.35 V and VDS = 0.7 V, and (b) small-signal equivalent circuit model used in pervious work[16]
    Measured fT against IDS of the Lg = 54.4 nm InGaAs/InAlAs HEMT with VDS = 0.7 V
    • Table 1. Small-signal model parameters of the Lg = 54.4 nm InGaAs/InAlAs HEMTs at VDS= 0.7 V, with different structures

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      Table 1. Small-signal model parameters of the Lg = 54.4 nm InGaAs/InAlAs HEMTs at VDS= 0.7 V, with different structures

      Cgs [fF/mm]Cgd [fF/mm]Cds [fF/mm]gmi [mS/mm]gds [mS/mm]Ri [Ω•mm]Rg [Ω•mm]
      322.1134.11 1242 431597.70.010.346 6
      RD [Ω•mm]RS [Ω•mm]Rgs [Ω•mm]Rgd [Ω•mm]fT_measure [GHz]fT_model [GHz]fmax_model [GHz]
      0.538 30.159 9375.93 617441443299
    • Table 2. Comparison with published InGaAs(InAs)/InAlAs HEMTs with Lg from 50 nm to 75 nm

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      Table 2. Comparison with published InGaAs(InAs)/InAlAs HEMTs with Lg from 50 nm to 75 nm

      Ref.Lg /nmGate metalChannelgm /(mS/mm)fT /GHz (VDS /V)fmax /GHz (VDS /V)
      1750Pt/Ti/Pt/AuInAs2 000496 (0.6)400 (0.6)
      1850Pt/Ti/Pt/AuIn0.7Ga0.3As1 750465 (0.75)1 060 (0.75)
      1960Pt/Ti/Pt/AuInAs2 100580 (0.6)675 (0.6)
      2060Pt/Ti/Pt/AuInAs2 114710 (0.5)478 (0.5)
      2170Ti/Pt/AuIn0.7Ga0.3As1 600310 (1.2)540 (1.2)
      2275Ti/Pt/AuInAs1 331260 (1.0)800 (1.0)
      This work54.4Ti/Pt/AuIn0.53Ga0.47As1 265441 (0.7)299 (0.7)
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    Rui-Ze FENG, Shu-Rui CAO, Zhi-Yu FENG, Fu-Gui ZHOU, Tong LIU, Yong-Bo SU, Zhi JIN. InGaAs/InAlAs InP-based HEMT with the current cutoff frequency of 441 GHz[J]. Journal of Infrared and Millimeter Waves, 2024, 43(3): 329

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    Paper Information

    Category: Research Articles

    Received: Apr. 13, 2023

    Accepted: --

    Published Online: Apr. 29, 2024

    The Author Email: Zhi JIN (jinzhi@ime.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2024.03.006

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