Acta Optica Sinica, Volume. 40, Issue 7, 0711003(2020)

A Dark-Field Detection Algorithm to Detect Surface Contamination in Large-Aperture Reflectors

Zhaoyang Yin1, Dezhi Zhang1, Linjie Zhao1,2, Mingjun Chen1、*, Jian Cheng1、**, Xiaodong Jiang2, Xinxiang Miao2, and Longfei Niu2
Author Affiliations
  • 1School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, China
  • 2Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China
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    Figures & Tables(13)
    Dark field detection schematic diagram
    Auto-focus process
    Sharpness evaluation function curve
    Calibration board
    Linear distorted projection model
    Linear distortion correction model
    Comparison before and after top hat transformation. (a) Grayscale map of original image; (b) grayscale map of transformation results
    Autofocus curve. (a) Tenengrad function curve of coarse adjustment; (b) focusing motor position curve of accurate adjustment; (c) sub-window Tenengrad function curve of accurate adjustment
    Image contrast before and after autofocusing. (a) Image before autofocusing; (b) image after autofocusing
    Binarization algorithm comparison. (a) Original image; (b) Otsu algorithm; (c) maximum entropy model; (d) mean weighted adaptive binarization algorithm; (e) Laplacian weighted adaptive binarization algorithm
    Results of ultra-depth microscope. (a) Microscopic image of area 1; (b) microscopic image of area 2
    • Table 1. Sharpness evaluation function performance indicators

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      Table 1. Sharpness evaluation function performance indicators

      Evaluation functionVarianceTenengradLaplaceBrennerInformation entropyRoberts
      Sharpness ratio2.08516.27753.47715.16532.51194.1152
      Steepness/10-45.27558.28457.04557.96856.23157.4850
      Fluctuation0.07100.02680.06520.00540.02030.0387
    • Table 2. Performance comparison of pollutant extraction algorithms

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      Table 2. Performance comparison of pollutant extraction algorithms

      ParemeterOtsuMaximum entropyMean weighted adaptive thresholdLaplace weighted adaptive threshold
      Running time /ms2262232037294
      Number error /%-62347
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    Zhaoyang Yin, Dezhi Zhang, Linjie Zhao, Mingjun Chen, Jian Cheng, Xiaodong Jiang, Xinxiang Miao, Longfei Niu. A Dark-Field Detection Algorithm to Detect Surface Contamination in Large-Aperture Reflectors[J]. Acta Optica Sinica, 2020, 40(7): 0711003

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    Paper Information

    Category: Imaging Systems

    Received: Sep. 2, 2019

    Accepted: Dec. 12, 2019

    Published Online: Apr. 15, 2020

    The Author Email: Chen Mingjun (chenmj@hit.edu.cn), Cheng Jian (cheng.826@hit.edu.cn)

    DOI:10.3788/AOS202040.0711003

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