A Dark-Field Detection Algorithm to Detect Surface Contamination in Large-Aperture Reflectors

Zhaoyang Yin; Dezhi Zhang; Linjie Zhao; Mingjun Chen; Jian Cheng; Xiaodong Jiang; Xinxiang Miao; Longfei Niu

doi:10.3788/AOS202040.0711003

Acta Optica Sinica, Volume. 40, Issue 7, 0711003(2020)

A Dark-Field Detection Algorithm to Detect Surface Contamination in Large-Aperture Reflectors

Zhaoyang Yin¹, Dezhi Zhang¹, Linjie Zhao^1,2, Mingjun Chen^1、*, Jian Cheng^1、**, Xiaodong Jiang², Xinxiang Miao², and Longfei Niu²

Author Affiliations

¹School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, China

²Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China

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Zhaoyang Yin, Dezhi Zhang, Linjie Zhao, Mingjun Chen, Jian Cheng, Xiaodong Jiang, Xinxiang Miao, Longfei Niu. A Dark-Field Detection Algorithm to Detect Surface Contamination in Large-Aperture Reflectors[J]. Acta Optica Sinica, 2020, 40(7): 0711003

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Paper Information

Category: Imaging Systems

Received: Sep. 2, 2019

Accepted: Dec. 12, 2019

Published Online: Apr. 15, 2020

The Author Email: Chen Mingjun (chenmj@hit.edu.cn), Cheng Jian (cheng.826@hit.edu.cn)

DOI:10.3788/AOS202040.0711003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology