Fig. 1. Structural diagram of experimental setup of EUV light source based on discharge produced Xe plasma

Fig. 2. Circuit diagram of main pulse power supply

Fig. 3. Typical voltage and current waveforms of main pulse

Fig. 4. EUV spectra emitted from Xe and He plasma

Fig. 5. Current waveform of main pulse and 13.5 nm radiation versus time

Fig. 6. 13.5 nm radiation and plasma radius versus time

Fig. 7. 13.5 nm radiation intensity versus current of main pulse

Fig. 8. 13.5 nm radiation intensity versus Xe flow rate

Fig. 9. EUV spectra emitted from Xe plasma under different ceramic tube diameters

Fig. 10. EUV spectra emitted from Xe plasma with different plasma lengths

Fig. 11. EUV spectra emitted from plasma under different He/Xe flow rate ratios

Fig. 12. 13.5 nm radiation intensity versus He/Xe flow rate ratio

Fig. 13. EUV spectra emitted from plasma under Xe/Ar mixed gas and pure Xe conditions

Fig. 14. Structural diagram of EUV light source prototype based on discharge produced Xe plasma

Fig. 15. Picture of debris mitigation tool of multilayer metal foil

Fig. 16. Diagram of optical path for 10 layer collector system

Fig. 17. Picture of collector after finish turning and polishing by hand

Fig. 18. Picture of EUV light source prototype based on discharge produced Xe plasma at repetition frequency of 1 kHz

Fig. 19. EUV spectrum emitted from discharge produced Xe plasma

Fig. 20. 13.5 nm radiation light pulse and current waveform of main pulse