Chinese Journal of Lasers, Volume. 45, Issue 11, 1100001(2018)
13.5 nm Extreme Ultraviolet Light Source Based on Discharge Produced Xe Plasma
The experimental setup of an extreme ultraviolet (EUV) light source is built. The EUV radiation spectrum with a central wavelength of 13.5 nm from the Xe plasma is obtained and the temporal characteristics are characterized. The multi-peak structure of a light pulse is clarified by the multiple pinch theory. The influence laws of the experimental parameters such as the current amplitude of main pulse, Xe flow rate, inner diameter of ceramic tube, plasma length, and auxiliary gas on EUV radiation intensity are obtained. In addition, a prototype of 13.5 nm EUV light source with a repetition rate of 1 kHz is built and its power supply system, discharge system, debris mitigation tool and collector system are described. The test results about the prototype are also given.
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Yongpeng Zhao, Qiang Xu, Qi Li, Qi Wang. 13.5 nm Extreme Ultraviolet Light Source Based on Discharge Produced Xe Plasma[J]. Chinese Journal of Lasers, 2018, 45(11): 1100001
Category: reviews
Received: May. 28, 2018
Accepted: Jul. 5, 2018
Published Online: May. 9, 2019
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