Evaluation Algorithm of Pupil Characteristic Parameters in Lithography Illumination System

Yu Gan; Fang Zhang; Siyu Zhu; Shuang Gong; Huijie Huang; Baoxi Yang

doi:10.3788/CJL201946.0304007

Chinese Journal of Lasers, Volume. 46, Issue 3, 0304007(2019)

Evaluation Algorithm of Pupil Characteristic Parameters in Lithography Illumination System

Yu Gan^1,2、*, Fang Zhang^1,2, Siyu Zhu^1,2, Shuang Gong^1,2, Huijie Huang^1,2, and Baoxi Yang^1,2、*

¹ Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

² University of Chinese Academy of Sciences, Beijing 100049, China

show less

Abstract Get PDF(in Chinese)

References(0)

Tools

Get Citation

Copy Citation Text

Yu Gan, Fang Zhang, Siyu Zhu, Shuang Gong, Huijie Huang, Baoxi Yang. Evaluation Algorithm of Pupil Characteristic Parameters in Lithography Illumination System[J]. Chinese Journal of Lasers, 2019, 46(3): 0304007

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: measurement and metrology

Received: Oct. 30, 2018

Accepted: Dec. 18, 2018

Published Online: May. 9, 2019

The Author Email:

DOI:10.3788/CJL201946.0304007

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology