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Chinese Journal of Lasers, Volume. 51, Issue 16, 1602208(2024)

Influence of Wet Etching Passivation on Surface Properties of Gallium Arsenide

Yalei Zhang, Yunping Lan*, Jiayuan Han, Hongrong Zhang, and Yonggang Zou
Author Affiliations
  • State Key Laboratory of High Power Semiconductor Laser, Changchun University of Science and Technology, Changchun 130013, Jilin , China
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    Article index updated: Mar. 10, 2025

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    Yalei Zhang, Yunping Lan, Jiayuan Han, Hongrong Zhang, Yonggang Zou. Influence of Wet Etching Passivation on Surface Properties of Gallium Arsenide[J]. Chinese Journal of Lasers, 2024, 51(16): 1602208

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    Paper Information

    Category: Laser Surface Machining

    Received: Oct. 11, 2023

    Accepted: Nov. 27, 2023

    Published Online: Jul. 24, 2024

    The Author Email: Lan Yunping (lanyp@cust.edu.cn)

    DOI:10.3788/CJL231276

    CSTR:32183.14.CJL231276

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology