Thin Film Optical Elements in Extreme Ultraviolet and Vacuum Ultraviolet

Runze Qi; Jinlong Zhang; Jiali Wu; Shuangying Li; Qiushi Huang; Zhong Zhang; Zhanshan Wang

doi:10.3788/AOS202242.1134003

Acta Optica Sinica, Volume. 42, Issue 11, 1134003(2022)

Thin Film Optical Elements in Extreme Ultraviolet and Vacuum Ultraviolet

Runze Qi, Jinlong Zhang, Jiali Wu, Shuangying Li, Qiushi Huang, Zhong Zhang, and Zhanshan Wang^*

Key Laboratory of Advanced Micro-Structured Materials, Ministry of Education, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

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Runze Qi, Jinlong Zhang, Jiali Wu, Shuangying Li, Qiushi Huang, Zhong Zhang, Zhanshan Wang. Thin Film Optical Elements in Extreme Ultraviolet and Vacuum Ultraviolet[J]. Acta Optica Sinica, 2022, 42(11): 1134003

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Paper Information

Category: X-Ray Optics

Received: Mar. 1, 2022

Accepted: Apr. 7, 2022

Published Online: Jun. 3, 2022

The Author Email: Wang Zhanshan (wangzs@tongji.edu.cn)

DOI:10.3788/AOS202242.1134003

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