On-Chip Photonic Lead Direct Writing Technology Based on Nano-Alignment Guide Star

Bowen Sun; Guozun Zhou; Zhenyu Yang; Yinxu Bian; Cuifang Kuang; Xu Liu

doi:10.3788/AOS231694

Acta Optica Sinica, Volume. 44, Issue 5, 0522003(2024)

On-Chip Photonic Lead Direct Writing Technology Based on Nano-Alignment Guide Star

Bowen Sun^1,2,3, Guozun Zhou^1,3, Zhenyu Yang^1,3, Yinxu Bian^1,2,3、*, Cuifang Kuang^1,2,3、**, and Xu Liu^1,2,3

Author Affiliations

¹State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang University, Hangzhou 310027, Zhejiang , China

²ZJU-Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, Hangzhou 311215, Zhejiang , China

³College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang , China

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Figures & Tables(9)

Fig. 1. Optical schematic diagram of two-photon LDW system

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Fig. 2. Photonic lead coupling structure (dotted line box is photonic lead to be written)

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Fig. 3. Simulation results. (a) EME scanning transmittance versus L_taper; (b) transmittance versus L_tip

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Fig. 4. Coupling substrate of photon lead

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Fig. 5. Schematic diagram of alignment mark

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Fig. 6. Flow chart of nano-alignment algorithm

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Fig. 7. Writing results of photonic lead. (a) One-time writing result; (b) three-time writing and splicing results

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Table 1. Parameters for coupling structure
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Table 1. Parameters for coupling structure
W_wg /nm H_wg /nm W_tip /nm W₀ /μm H₀ /μm L_taper /μm L_tip /μm
500 220 130 3 3 100 10

Table 2. Alignment accuracy of photonic lead writing

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Table 2. Alignment accuracy of photonic lead writing

Number	Horizontaldistance /μm	Verticaldistance /μm	Distancedeviation /μm	Photoniclead slope	Waveguideslope	Angledeviation /（°）
1	0.021	0.020	0.029	0.0034	0.0047	0.075
2	0.031	0.025	0.040	-0.0023	0.0040	0.363
3	0.013	0.005	0.014	0.0120	0.0133	0.077
4	0.007	0.001	0.007	0.0110	0.0099	0.060
5	0.051	0.018	0.054	0.0058	-0.0009	0.383
6	0.026	0.013	0.029	0.0020	-0.0010	0.173

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Bowen Sun, Guozun Zhou, Zhenyu Yang, Yinxu Bian, Cuifang Kuang, Xu Liu. On-Chip Photonic Lead Direct Writing Technology Based on Nano-Alignment Guide Star[J]. Acta Optica Sinica, 2024, 44(5): 0522003

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