On-Chip Photonic Lead Direct Writing Technology Based on Nano-Alignment Guide Star

Bowen Sun; Guozun Zhou; Zhenyu Yang; Yinxu Bian; Cuifang Kuang; Xu Liu

doi:10.3788/AOS231694

Acta Optica Sinica, Volume. 44, Issue 5, 0522003(2024)

On-Chip Photonic Lead Direct Writing Technology Based on Nano-Alignment Guide Star

Bowen Sun^1,2,3, Guozun Zhou^1,3, Zhenyu Yang^1,3, Yinxu Bian^1,2,3、*, Cuifang Kuang^1,2,3、**, and Xu Liu^1,2,3

Author Affiliations

¹State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang University, Hangzhou 310027, Zhejiang , China

²ZJU-Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, Hangzhou 311215, Zhejiang , China

³College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang , China

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Bowen Sun, Guozun Zhou, Zhenyu Yang, Yinxu Bian, Cuifang Kuang, Xu Liu. On-Chip Photonic Lead Direct Writing Technology Based on Nano-Alignment Guide Star[J]. Acta Optica Sinica, 2024, 44(5): 0522003

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Paper Information

Category: Optical Design and Fabrication

Received: Oct. 24, 2023

Accepted: Dec. 20, 2023

Published Online: Mar. 19, 2024

The Author Email: Yinxu Bian (byx@zju.edu.cn), Cuifang Kuang (cfkuang@zju.edu.cn)

DOI:10.3788/AOS231694

CSTR:32393.14.AOS231694

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