Review on Morphological Features and Process Control of Holes Drilled by Pulsed Laser on Surface of Electronic Ceramic Substrates

Wanqin Zhao; Xuesong Mei; Zixuan Yang

doi:10.3788/CJL202249.1002403

Chinese Journal of Lasers, Volume. 49, Issue 10, 1002403(2022)

Review on Morphological Features and Process Control of Holes Drilled by Pulsed Laser on Surface of Electronic Ceramic Substrates

Wanqin Zhao^1,2, Xuesong Mei^1,2、*, and Zixuan Yang^1,2

Author Affiliations

¹School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710064, Shaanxi, China

²State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710064, Shaanxi, China

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Wanqin Zhao, Xuesong Mei, Zixuan Yang. Review on Morphological Features and Process Control of Holes Drilled by Pulsed Laser on Surface of Electronic Ceramic Substrates[J]. Chinese Journal of Lasers, 2022, 49(10): 1002403

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Paper Information

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Received: Nov. 15, 2021

Accepted: Jan. 19, 2022

Published Online: May. 9, 2022

The Author Email: Mei Xuesong (xsmei@xjtu.edu.cn)

DOI:10.3788/CJL202249.1002403

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology