[1] [1] Lu Zheng, Chong Geng, Qingfeng Yan. Hierarchically ordered arrays based on solvent vapor annealed colloidal monolayers for antireflective coating[J]. Thin Solid Films, 2013, 544: 403-406.

[2] [2] B G Prevo, E W Hon, O D Velev. Assembly and characterization of colloid-based antireflective coatings on multicrystalline silicon solar cells[J]. J Mater Chem, 2007, 17(8): 791-799.

[3] [3] C H Sun, P Jiang, B Jiang. Broadband moth-eye antireflection coatings on silicon[J]. Appl Phys Lett, 2008, 92(6): 061112.

[4] [4] Grauvogl M, Aberle A, Hezel R. 17.1% Efficient truncated-pyramid inversion-layer silicon solar cells[C]. 25th IEEE Photovoltaic Specialists Conference, 1996: 433-436.

[5] [5] Chen Gang, Ma Xun, Liu Zuming, et al.. Research on monocrystalline silicon surface etching[J]. Manufacturing and Application of Device, 2010, 35(2): 137-141.

[6] [6] Nishimoto Y, Namba K. Investigation of texturization for crystalline silicon solar cells with sodium carbonates solutions[J]. Solar Energy Materials and Solar Cells, 2000, 61(4): 393-402.

[7] [7] Zhou Chunlan, Wang Wenjing, Zhao Lei, et al.. Preparation and characterization of homogeneity and the pyramids on the textured single silicon crystal[J]. Acta Physica Sinica, 2010, 59(8): 5777-5783.

[8] [8] Xi Zhenqiang, Yang Deren, Wu Dan, et al.. Texturization of monocrystalline silicon for solar cells[J]. Acta Energiae Solaris Sinica, 2002, 23(3): 285-289.

[9] [9] Long Xuewen, Bai Jing, Liu Xin, et al.. Inscription of waveguides in terbium gallium garnet using femtosecond laser[J]. Acta Optica Sinica, 2014, 34(4): 0432002.

[10] [10] Chen Chao, Yang Xianhui, Wang Chuang, et al.. High-order tilted fiber Bragg gratings carved with femtosecond laser[J]. Acta Optica Sinica, 2014, 34(5): 0506001.

[11] [11] Shen Bin, Li Haiyuan, Xiong Huai, et al.. Study on the colloidal regularity of porous SiO2 antireflective of porous SiO2 antireflective coatings[J]. Chinese J Lasers, 2014, 41(9): 0906002.

[12] [12] Zhang Zhuqing, Wang Qiang, Hua Guoran, et al.. Influence of YAG laser frequency on a:H-Si thin films micro-crystallization[J]. Laser & Optoelectronics Progress, 2013, 50(2): 021406.

[13] [13] Zhang Chao, Zhang Qingmao, Guo Liang, et al.. Texturing process with 355 nm laser for amorphous silicon film solar cell[J]. Chinese J Lasers, 2013, 40(7): 0707004.

[14] [14] Zhang Shan, Hu Xiaoning, Liao Yang, et al.. Microstructuring of anti-reflection film for HgCdTe/Si IRFPA with femtosecond laser pulse[J]. Chin Opt Lett, 2013, 11(3): 033101.

[15] [15] Dobrzanski L A, Drygala A. Laser processing of multicrystalline silicon for texturization of solar cells[J]. Journal of Materials Processing Technology, 2007, 191(1-3): 228-231.

[16] [16] Kwang Ryul Kim, Tae Hoon Kim, Hyun Ae Park, et al.. UV laser direct texturing for high efficiency multicrystalline silicon solar cell [J]. Applied Surface Science, 2013, 264: 404-409.

[17] [17] K Kumar, K C Lee, J Nogami, et al.. Ultrafast laser direct hard-mask writing for high performance inverted-pyramidal texturing of silicon[C]. IEEE Photovoltalic Specialists Conference, 2012: 002182-002185.

[18] [18] Wang Xuemeng, Zhao Ruqiang, Shen Hui, et al.. Laser surface texturation of multicrystalline silicon for solar cell[J]. Laser & Optoelectronics Progress, 2010, 47(1): 011401.

[19] [19] Tsing-Hua Her, Richard J Finlay, Claudia, et al.. Microstructuring of silicon with femtosecond laser pulses[J]. Applied Physics Letters, 1998, 73(12): 1673-1675.

[20] [20] Li Ping, Wang Yu, Feng Guojin, et al.. Study of silicon micro-structuring using ultra-short laser pulses[J]. Chinese J Lasers, 2006, 33(12): 1688-1691.

[21] [21] Shen Zenan, Liu Bangwu, Xia Yang, et al.. Advances in fabrication and application of black silicon[J]. Research & Progress of SSE, 2011, 31(4): 387-392.

[22] [22] Ji Lingfei, Ling Chen, Li Qiurui, et al.. Research progress and development of industrial application of picosecond laser processing [J]. Journal of Mechanical Engineering, 2014, 50(5): 115-126.

[23] [23] Wang Guobiao. Photonic manufacturing science & technology: overview and outlook[J]. Journal of Mechanical Engineering, 2011, 47(21): 157-169.

[24] [24] Sha Tao, Benxin Wu, Yun Zhou, et al.. Thermal modeling and experimental study of infrared nanosecond laser ablation of silicon[J]. J Appl Phy, 2009, 106(12): 123507.