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Chinese Journal of Lasers, Volume. 42, Issue 4, 403006(2015)

Fabrication of High Performance Anti-Reflection Silicon Surface by Picosecond Laser Scanning Irradiation with Chemical Corrosion

Lü Xiaozhan*, Ji Lingfei, Wu Yan, Lin Zhenyuan, and Yan Yinzhou
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    Article index updated: Mar. 10, 2025

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    Lü Xiaozhan, Ji Lingfei, Wu Yan, Lin Zhenyuan, Yan Yinzhou. Fabrication of High Performance Anti-Reflection Silicon Surface by Picosecond Laser Scanning Irradiation with Chemical Corrosion[J]. Chinese Journal of Lasers, 2015, 42(4): 403006

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    Paper Information

    Category: laser manufacturing

    Received: Oct. 30, 2014

    Accepted: --

    Published Online: Apr. 2, 2015

    The Author Email: Xiaozhan Lü (xiaozhan_lv@126.com)

    DOI:10.3788/cjl201542.0403006

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology