Chinese Journal of Lasers, Volume. 42, Issue 4, 403006(2015)
Fabrication of High Performance Anti-Reflection Silicon Surface by Picosecond Laser Scanning Irradiation with Chemical Corrosion
Get Citation
Copy Citation Text
Lü Xiaozhan, Ji Lingfei, Wu Yan, Lin Zhenyuan, Yan Yinzhou. Fabrication of High Performance Anti-Reflection Silicon Surface by Picosecond Laser Scanning Irradiation with Chemical Corrosion[J]. Chinese Journal of Lasers, 2015, 42(4): 403006
Category: laser manufacturing
Received: Oct. 30, 2014
Accepted: --
Published Online: Apr. 2, 2015
The Author Email: Xiaozhan Lü (xiaozhan_lv@126.com)