Research Advancement on Laser Micro-Nano Processing of New Energy Devices

Ce Yang; Huhu Cheng; Liangti Qu

doi:10.3788/CJL202148.1502004

Chinese Journal of Lasers, Volume. 48, Issue 15, 1502004(2021)

Research Advancement on Laser Micro-Nano Processing of New Energy Devices

Ce Yang^1,2, Huhu Cheng^1,2、**, and Liangti Qu^1,2、*

Author Affiliations

¹State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

²Key Laboratory of Organic Optoelectronics & Molecular Engineering, Ministry of Education, Department of Chemistry, Tsinghua University, Beijing 100084, China;

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Ce Yang, Huhu Cheng, Liangti Qu. Research Advancement on Laser Micro-Nano Processing of New Energy Devices[J]. Chinese Journal of Lasers, 2021, 48(15): 1502004

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Paper Information

Category: laser manufacturing

Received: Mar. 29, 2021

Accepted: Jun. 2, 2021

Published Online: Aug. 5, 2021

The Author Email: Huhu Cheng (huhucheng@tsinghua.edu.cn), Liangti Qu (lqu@mail.tsinghua.edu.cn)

DOI:10.3788/CJL202148.1502004

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology