Acta Optica Sinica, Volume. 43, Issue 8, 0822027(2023)

Calibration Method of Pattern Place Error-Induced Wavefront Distortion with Complex-Phase Computer-Generated Holograms

Haitao Zhang1,2,3, Le Xu2, and Changqing Xie1,3、*
Author Affiliations
  • 1Key Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 2State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, Jilin, China
  • 3School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China
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    Haitao Zhang, Le Xu, Changqing Xie. Calibration Method of Pattern Place Error-Induced Wavefront Distortion with Complex-Phase Computer-Generated Holograms[J]. Acta Optica Sinica, 2023, 43(8): 0822027

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Oct. 31, 2022

    Accepted: Jan. 12, 2023

    Published Online: Apr. 6, 2023

    The Author Email: Xie Changqing (xiechangqing@ime.ac.cn)

    DOI:10.3788/AOS221897

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