Calibration Method of Pattern Place Error-Induced Wavefront Distortion with Complex-Phase Computer-Generated Holograms

Haitao Zhang; Le Xu; Changqing Xie

doi:10.3788/AOS221897

Acta Optica Sinica, Volume. 43, Issue 8, 0822027(2023)

Calibration Method of Pattern Place Error-Induced Wavefront Distortion with Complex-Phase Computer-Generated Holograms

Haitao Zhang^1,2,3, Le Xu², and Changqing Xie^1,3、*

¹Key Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China

²State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, Jilin, China

³School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China

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Figures & Tables(8)

Fig. 1. Diagram of pattern place error

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Fig. 2. Schematic diagram of optical path difference of plane wavefront

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Fig. 3. Schematic diagram of optical path difference of aspherical wavefront

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Fig. 4. Aspheric phase fitting. (a) Non-uniform aspheric phase; (b) cubic B-spline fitting phase; (c) fitting residual distribution

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Fig. 5. Pattern on complex phase CGH

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$Diffraction intensity distribution corresponding to amplitude proportion of 4 wavefronts. (a) Amplitude proportion of 4 wavefronts of 1∶1∶2.33∶2.33; (b) amplitude proportion of 4 wavefronts of 1∶1∶3∶3; (c) amplitude proportion of 4 wavefronts of 1∶1∶8∶8$

Fig. 6. Diffraction intensity distribution corresponding to amplitude proportion of 4 wavefronts. (a) Amplitude proportion of 4 wavefronts of 1∶1∶2.33∶2.33; (b) amplitude proportion of 4 wavefronts of 1∶1∶3∶3; (c) amplitude proportion of 4 wavefronts of 1∶1∶8∶8

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Fig. 7. Aspheric detection wavefront error method for calibration of pattern place error. (a) Mirror placed in emission direction of +1^st plane wave along x direction; (b) mirror placed in emission direction of -1^stplane wave along x direction; (c) mirror placed in emission direction of +1^st plane wave along y direction; (d) mirror placed in emission direction of -1^stplane wave along y direction

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Table 1. Simulation parameters
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Table 1. Simulation parameters
Parameter Plane Spherical Non-spherical
Inclination angle /（°） 4 0 0
R /mm -900 -418.212
K -1.357×10^-10
A₄ -8.954×10^-16
A₆ -6.591×10^-21
A₈ 7.625×10^-27

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Haitao Zhang, Le Xu, Changqing Xie. Calibration Method of Pattern Place Error-Induced Wavefront Distortion with Complex-Phase Computer-Generated Holograms[J]. Acta Optica Sinica, 2023, 43(8): 0822027

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