Calibration Method of Pattern Place Error-Induced Wavefront Distortion with Complex-Phase Computer-Generated Holograms

Haitao Zhang; Le Xu; Changqing Xie

doi:10.3788/AOS221897

Acta Optica Sinica, Volume. 43, Issue 8, 0822027(2023)

Calibration Method of Pattern Place Error-Induced Wavefront Distortion with Complex-Phase Computer-Generated Holograms

Haitao Zhang^1,2,3, Le Xu², and Changqing Xie^1,3、*

¹Key Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China

²State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, Jilin, China

³School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China

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Haitao Zhang, Le Xu, Changqing Xie. Calibration Method of Pattern Place Error-Induced Wavefront Distortion with Complex-Phase Computer-Generated Holograms[J]. Acta Optica Sinica, 2023, 43(8): 0822027

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Paper Information

Category: Optical Design and Fabrication

Received: Oct. 31, 2022

Accepted: Jan. 12, 2023

Published Online: Apr. 6, 2023

The Author Email: Xie Changqing (xiechangqing@ime.ac.cn)

DOI:10.3788/AOS221897

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