[1] Ruckstuhl T, Walser A, Verdes D et al. Confocal reader for biochip screening and fluorescence microscopy[J]. Biosensors and Bioelectronics, 20, 1872-1877(2005). http://www.ncbi.nlm.nih.gov/pubmed/15681208

[2] Department of Engineering, Materials Science. State Natural Science Funds Commission,[M]. Report on the development strategy of mechanical engineering: 2011-2020(2010).

[3] He B F, Ding S Y, Wei C E et al. Review of measurement methods for areal surface roughness[J]. Optics and Precision Engineering, 27, 78-93(2019).

[4] Tu L, Yu J, Fan Z W et al. Parallel confocal microscopic detection technique and its research progress[J]. Laser & Optoelectronics Progress, 49, 080006(2012).

[5] Yu Q, Yu X F, Cui C C et al. Survey of parallel light parallel confocal source technology in measurement[J]. Chinese Optics, 6, 652-659(2013).

[6] Zhu Q, Yang X B, Li S M et al. Spot array optimization of parallel confocal imaging based on digital micromirror device[J]. Acta Optica Sinica, 38, 0118001(2018).

[7] Hillenbrand M, Weiss R, Endrody C et al. Chromatic confocal matrix sensor with actuated pinhole arrays[J]. Applied Optics, 54, 4927-4936(2015).

[8] Wang F S, Tan J B, Zhao W Q. Optical probe using differential confocal technique for surface profile[J]. Proceedings of SPIE, 4222, 194-197(2000).

[9] Zhao W Q, Tan J B, Qiu L R. Tri-heterodyne confocal microscope with axial superresolution and higher SNR[J]. Optics Express, 12, 5191-5197(2004).

[10] Liu J, Tan J B, Bin H et al. Improved differential confocal microscopy with ultrahigh signal-to-noise ratio and reflectance disturbance resistibility[J]. Applied Optics, 48, 6195-6201(2009).

[11] Liu Z Q, Yi D R, Kong L H et al. Object-side based differential axial measurement based on parallel confocal microscopy[J]. Optics and Precision Engineering, 25, 1449-1457(2017).

[12] Yi D R, Liu Z Q, Kong L H et al. A parallel differential confocal method for highly precise surface height measurements[J]. IEEE Photonics Technology Letters, 32, 375-378(2020).

[13] Liu Z Q, Yi D R, Kong L H et al. Research on the structured light illumination parallel object-side differential rapid measurement method[J]. Chinese Journal of Scientific Instrument, 38, 2987-2993(2017).

[14] Zhu X X, Yi D R, Ye Y Q et al. High-precision three-dimensional shape measurement based on anti-interference parallel object-side differential axial[J]. Acta Optica Sinica, 40, 0412001(2020).

[15] Liu L, Deng X Q, Wang G Y et al. Phase-only optical pupil filter for improving axial resolution in confocal microscopy[J]. Acta Physica Sinica, 50, 48-51(2001).

[16] Qiu L R, Wang L, Liu D L et al. Image inpainting for the differential confocal microscope[J]. Proceedings of SPIE, 9446, 94463D(2015).