Wide-Field Error Correction Method for Parallel Differential Confocal Axial Measurement

Yiqing Ye; Dingrong Yi; Wei Jiang; Linghua Kong; Caihong Huang

doi:10.3788/AOS202040.2018001

Acta Optica Sinica, Volume. 40, Issue 20, 2018001(2020)

Wide-Field Error Correction Method for Parallel Differential Confocal Axial Measurement

Yiqing Ye¹, Dingrong Yi^1、*, Wei Jiang¹, Linghua Kong^2、**, and Caihong Huang¹

Author Affiliations

¹College of Mechanical Engineering and Automation, Huaqiao University, Xiamen, Fujian 361021, China

²School of Mechanical and Automotive Engineering, Fujian University of Technology, Fuzhou, Fujian 350118, China

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Yiqing Ye, Dingrong Yi, Wei Jiang, Linghua Kong, Caihong Huang. Wide-Field Error Correction Method for Parallel Differential Confocal Axial Measurement[J]. Acta Optica Sinica, 2020, 40(20): 2018001

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Paper Information

Category: Microscopy

Received: May. 25, 2020

Accepted: Jul. 3, 2020

Published Online: Sep. 19, 2020

The Author Email: Yi Dingrong (yidr@hqu.edu.cn), Kong Linghua (klh@fjut.edu.cn)

DOI:10.3788/AOS202040.2018001

Topics

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