Fig. 1. Experimental principle of the measurement of detects in thin films by using nano aperture tip

Fig. 2. Measurement results of AFM and SNOM at the same time. (a) AFM graph; (b) SNOM graph; (c) profile graph and width of the flaw in AFM graph; (d) profile graph of the flaw in SNOW graph; (e) profile graph and a minimum width of the crack in SNOM graph; (f) profile graph of two line knots and their distance in SNOM graph

Fig. 3. (a) AFM and (b) SNOM graphs of surface microhole and internal multi-knots on the thin film surfaces of simultaneous measurement