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Acta Optica Sinica, Volume. 44, Issue 9, 0912004(2024)

Overlay Error Measurement Method Based on Through-Focus Scanning Optical Microscopy

Hao Liu1, Jinsong Wang1、*, Junkai Shi2、**, Guannan Li2, Xiaomei Chen2, and Weihu Zhou2
Author Affiliations
  • 1School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin, China
  • 2Optoelectronic Technology R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (10)
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    References (23)
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    Figures & Tables(10)
    IBO mark Bar-in-Bar. (a) Schematic diagram of measurement method for IBO error; (b) schematic diagram of IBO mark location

    Fig. 1. IBO mark Bar-in-Bar. (a) Schematic diagram of measurement method for IBO error; (b) schematic diagram of IBO mark location

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    Schematic diagram of through-focus scanning measurement process. (a) Optical microscope; (b) schematic diagram of through-focus scanning; (c) captured vertical profile of optical model; (d) TSOM pattern

    Fig. 2. Schematic diagram of through-focus scanning measurement process. (a) Optical microscope; (b) schematic diagram of through-focus scanning; (c) captured vertical profile of optical model; (d) TSOM pattern

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    Overlay error prediction flowchart based on deep learning model

    Fig. 3. Overlay error prediction flowchart based on deep learning model

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    Neural network structure

    Fig. 4. Neural network structure

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    Dataset acquisition process

    Fig. 5. Dataset acquisition process

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    Model prediction results for different step size of offset. (a) Step size is 200 nm; (b) step size is 100 nm; (c) step size is 50 nm; (d) step size is 20 nm

    Fig. 6. Model prediction results for different step size of offset. (a) Step size is 200 nm; (b) step size is 100 nm; (c) step size is 50 nm; (d) step size is 20 nm

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    Evaluation indicators of model prediction performance

    Fig. 7. Evaluation indicators of model prediction performance

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    Measurement results of single-point repeatability of model. (a) Overall sample STD values; (b) measurement results of 0.02 μm sample

    Fig. 8. Measurement results of single-point repeatability of model. (a) Overall sample STD values; (b) measurement results of 0.02 μm sample

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    • Table 1. Network parameters

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      Table 1. Network parameters

      Layer(Input channel number, output channel number)Kernel sizeStrideInputOutput
      Convolution(1, 64)(3, 3)(1, 1)(1, 140, 380)(64, 140, 38)
      ReLU (Maxpool)(64, 64)(2, 2)(2, 2)(64, 140, 380)(64, 70, 190)
      Convolution(64, 256)(3, 3)(1, 1)(64, 70, 190)(256, 70, 190)
      ReLU (Maxpool)(256, 256)(2, 2)(2, 2)(256, 70, 190)(256, 35, 95)
      Convolution(256, 512)(3, 3)(1, 1)(256, 35, 95)(512, 35, 95)
      ReLU (Maxpool)(512, 512)(2, 2)(2, 2)(512, 35, 95)(512, 17, 47)
      Linear———512×17×474096
      Linear———40961024
      Linear———10241

    • Table 2. Sample parameters

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      Table 2. Sample parameters

      No.Side length /μmLinewidth /μmOffset /nmOffset interval /nm
      1262-598.51, -399.69, -199.68, -0.13, 199.59, 399.67, 599.37200
      2262-299.01, -199.21, -100.30, -0.05, 99.60, 200.04, 299.89100
      3262-149.60, -100.02, -49.15, 0.41, 49.32, 100.46, 151.0150
      4262-57.70, -39.43, -18.71, 0.23, 20.98, 40.50, 61.0620
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    Hao Liu, Jinsong Wang, Junkai Shi, Guannan Li, Xiaomei Chen, Weihu Zhou. Overlay Error Measurement Method Based on Through-Focus Scanning Optical Microscopy[J]. Acta Optica Sinica, 2024, 44(9): 0912004

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 7, 2023

    Accepted: Feb. 26, 2024

    Published Online: May. 15, 2024

    The Author Email: Jinsong Wang (Soldier_1973@163.com), Junkai Shi (shijunkai@ime.ac.cn)

    DOI:10.3788/AOS231900

    CSTR:32393.14.AOS231900

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology