Overlay Error Measurement Method Based on Through-Focus Scanning Optical Microscopy

Hao Liu; Jinsong Wang; Junkai Shi; Guannan Li; Xiaomei Chen; Weihu Zhou

doi:10.3788/AOS231900

Acta Optica Sinica, Volume. 44, Issue 9, 0912004(2024)

Overlay Error Measurement Method Based on Through-Focus Scanning Optical Microscopy

Hao Liu¹, Jinsong Wang^1、*, Junkai Shi^2、**, Guannan Li², Xiaomei Chen², and Weihu Zhou²

Author Affiliations

¹School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin, China

²Optoelectronic Technology R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China

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Hao Liu, Jinsong Wang, Junkai Shi, Guannan Li, Xiaomei Chen, Weihu Zhou. Overlay Error Measurement Method Based on Through-Focus Scanning Optical Microscopy[J]. Acta Optica Sinica, 2024, 44(9): 0912004

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Dec. 7, 2023

Accepted: Feb. 26, 2024

Published Online: May. 15, 2024

The Author Email: Jinsong Wang (Soldier_1973@163.com), Junkai Shi (shijunkai@ime.ac.cn)

DOI:10.3788/AOS231900

CSTR:32393.14.AOS231900

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Instrumentation, Measurement and Metrology