Chinese Optics Letters, Volume. 14, Issue 7, 071202(2016)

Improved phase-shifting diffraction interferometer for microsphere topography measurements

Guodong Liu, Binghui Lu, Heyi Sun, Bingguo Liu*, Fengdong Chen, and Zhitao Zhuang
Author Affiliations
  • Instrument Science and Technology, Harbin Institute of Technology, Harbin 150001, China
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    References(19)

    [2] B. Shi, H. Xiao, C. Li. Chin. Opt. Lett., 1, 040234(2003).

    [8] J. Hahn, H. Kim, Y. J. Lim, E. H. Kim, B. Lee. Chin. Opt. Lett., 7, 121113(2009).

    [9] R. C. Montesanti, M. A. Johnson, E. R. Mapoles. American Society for Precision Engineering Annual Conference 10(2006).

    [10] S. J. Li, Y. Z. Liu. Laser J., 21, 59(2000).

    [17] Y. Lu, X. Wang, X. Zhong, G. He, Y. Liu, D. Zheng. Chin. Opt. Lett., 2, 698(2004).

    CLP Journals

    [1] Xiao Lin, Yong Huang, Yang Li, Jinyan Liu, Jinpeng Liu, Ruidan Kang, Xiaodi Tan, "Four-level phase pair encoding and decoding with single interferometric phase retrieval for holographic data storage," Chin. Opt. Lett. 16, 032101 (2018)

    [2] Meng Zheng, Ke Liu, Lihui Liu, Yanqiu Li, "Design of a grating by a joint optimization method for a phase-shifting point diffraction interferometer," Chin. Opt. Lett. 15, 101203 (2017)

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    Guodong Liu, Binghui Lu, Heyi Sun, Bingguo Liu, Fengdong Chen, Zhitao Zhuang, "Improved phase-shifting diffraction interferometer for microsphere topography measurements," Chin. Opt. Lett. 14, 071202 (2016)

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    Paper Information

    Category: Instrumentation, measurement, and metrology

    Received: Apr. 25, 2016

    Accepted: May. 5, 2016

    Published Online: Aug. 3, 2018

    The Author Email: Bingguo Liu (liu_bingguo@hit.edu.cn)

    DOI:10.3788/COL201614.071202

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