Chinese Optics Letters, Volume. 14, Issue 7, 071202(2016)
Improved phase-shifting diffraction interferometer for microsphere topography measurements
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Guodong Liu, Binghui Lu, Heyi Sun, Bingguo Liu, Fengdong Chen, Zhitao Zhuang, "Improved phase-shifting diffraction interferometer for microsphere topography measurements," Chin. Opt. Lett. 14, 071202 (2016)
Paper Information
Category: Instrumentation, measurement, and metrology
Received: Apr. 25, 2016
Accepted: May. 5, 2016
Published Online: Aug. 3, 2018
The Author Email: Bingguo Liu (liu_bingguo@hit.edu.cn)
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