Researching | Improved phase-shifting diffraction interferometer for microsphere topography measurements

Chinese Optics Letters, Volume. 14, Issue 7, 071202(2016)

Improved phase-shifting diffraction interferometer for microsphere topography measurements

Guodong Liu, Binghui Lu, Heyi Sun, Bingguo Liu^*, Fengdong Chen, and Zhitao Zhuang

Author Affiliations

Instrument Science and Technology, Harbin Institute of Technology, Harbin 150001, China

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Fig. 1. Diagram of the PSDI.

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$Diffraction self-calibration.$

Fig. 2. Diffraction self-calibration.

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Fig. 3. Experimental setup.

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Fig. 4. Calibrated systematic errors.

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Fig. 5. Interference pattern and signal.

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Fig. 6. Measured topographical errors.

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Table 1. Measured Result Comparison.
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Table 1. Measured Result Comparison.
Method PV (nm) RMS (nm)
SWLI 64.41 16.32
PSDI (local region) 66.17 16.89
PSDI (full aperture) 84.43 18.41

Table 2. PV, Rq, and Ra of Five Testing Locations.
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Table 2. PV, Rq, and Ra of Five Testing Locations.
Area No. PV $(λ)$ RMS $R_{q}$ $(λ)$ Roughness $R_{a}$ $(λ)$
1 0.1589 0.0352 0.0288
2 0.1575 0.0351 0.0279
3 0.1642 0.0357 0.0286
4 0.1566 0.0348 0.0275
5 0.1561 0.0346 0.0273
Average 0.1587 0.0351 0.0280

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Guodong Liu, Binghui Lu, Heyi Sun, Bingguo Liu, Fengdong Chen, Zhitao Zhuang, "Improved phase-shifting diffraction interferometer for microsphere topography measurements," Chin. Opt. Lett. 14, 071202 (2016)

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Apr. 25, 2016

Accepted: May. 5, 2016

Published Online: Aug. 3, 2018

The Author Email: Bingguo Liu (liu_bingguo@hit.edu.cn)

DOI:10.3788/COL201614.071202

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology